Heating Spin Coater with Ultrasonic, Atmosphere for Semiconductor Silicon Wafer

• After-sales Service: on-Line Service
• Warranty: 1 Year
• Type: Spin Coating
• Coating: Vacuum Coating
• Substrate: Steel
• Certification: CE
• Model NO.: TN-SPC-100ML
• Condition: New
• Production Name: Spin Coater
• Material: Liquid or Colloidal
• Spin Speed: 100~10000rpm
• Acceleration: 100~5000rpm/S
• Substrate Size: 100mm
• Voltage: AC220V, 50Hz
• Vacuum Pump: Dry Mechanical Pump
• Coating Curve: 5 Segments Per Curve
• Chucks: 10/25/55/100mm
• Heating: Customized
• Control: LCD Touch Screen
• Transport Package: Fumigated Wooden Box
• Specification: 28*365*300mm
• Trademark: TN
• Origin: China
• HS Code: 8486209000
• Production Capacity: 20

Product Description

Product Description

 

WHAT IS SPIN COATINGA:

Spin coating is a procedure used to deposit uniform thin films to flat substrates. Usually a small amount of coating material is applied on the center of the substrate, which is either spinning at low speed or not spinning at all. The substrate is then rotated at high speed in order to spread the coating material by centrifugal force.

A machine used for spin coating is called a Spin Coater.

 Application of the spin coater

The spin coater can coat liquid or colloidal materials on silicon wafers, crystals, quartz, ceramics and other substrates to form thin films. It is mainly used in photoresist spin coating, biological medium preparation, sol-gel method for polymer film production, etc.

Product Parameters

 

Specifications of spin coater

Name	ultrasonic assisted atmosphere spin coater
Substrate size	6inches
Rotation speed	100~10000rpm adjustable
Rotational acceleration	100~5000rpm/s adjustable
Longest spinning time(a single time)	3000s
chamber size	Φ200mm* 90mm
Voltage	220V 50Hz
Power	400W
Heating Temp	0-100ºC
Warranty	1 year, life-long technical support, excluding vulnerable parts

Specifications of Ultrasonic system

Atomizing head Material	Titanium alloy
Frequency	40kHz
Power	130W
Flow	0.55mL/s
Particle diameter	25um
Atomizing head type	Cone type
Atomizing head weight	0.3kg
Ultrasonic power supply	Size:315*312*135mm,weight:5kg

Specifications of syringe pump

Flow range	0.001uL/min-43.349mL/min
Power down memory function	Save the setting parameters, no need to set them after power on again
Injector	10uL-1000uL
Syringe	1mL-60mL
Linear speed range	5um/min-65um/min
Linear speed adjustment resolution	5um/min
Maximum stroke	140mm
Travel resolution	0.156um
Rated linear thrust	>90N

Specifications of flowmeter 

Control gas type	2
Gas flow rate	16-160mL/min

 

Detailed Photos

 

Company Profile

 

FAQ

Q. Are you manufacturer or trading company?

A. We are professional manufacturer of  laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service. 

Q. How's your warranty?

A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.

Q. Power supply and plug?

A. We can provide products accroding to your local voltage and plug standard.

Q. How to pay?

A. T T, L / C, D / P, etc.

Q. How is the package of goods? Delivery methods?

A. Standard export fumigation sign wooden box packaging or as your requirements.

Thanks for your efforts to make the world bettter!
Any questions about our spin coater, please contact us.