New Design Pecvd Chemical Vapor Deposition

• After-sales Service: 12 Months
• Warranty: 12 Months
• Application: School, Lab
• Customized: Customized
• Certification: CE
• Structure: Desktop
• Model NO.: PECVD
• Material: Stainless Steel
• Type: Tubular Furnace
• Gas Supply System: Gas Flow Flowmeter
• RF Power Output Power: 50W
• Vacuum Pump: Bipolar Rotary Vane Vacuum Pump
• Working Temperature: <=1200c
• Mass Flowmeter: up to 5ways
• RF Frequency: 13.56MHz
• Ultimate Vacuum: 10^-1PA
• RF: 13.56MHz+0.005%
• Heating Zone: Single Heating Zone 200mm
• Cooling Method: Forced Air Cooling
• Furnace Tube Size: Dia. 50*1200mm
• Furnace Tube Material: High Purity Quartz
• Transport Package: Standard Export Fumigation Sign Wooden Box Package
• Specification: 2400*800*1250mm
• Trademark: TN
• Origin: Henan China
• HS Code: 8486209000
• Production Capacity: 220/Month

Product Description

PECVD vapor deposition
 

Product Description

 

Plasma -enhanced chemical vapor deposition (PECVD) is a type of chemical vapor deposition characterized by the use of plasma activation at low temperatures to enhance the chemical vapor deposition reaction. The advantages of this method are that the deposition temperature is low, the deposition rate is fast, and the film produced has excellent electrical properties, good substrate adhesion and excellent step coverage.

PECVD vapor deposition application areas:
Plasma enhanced CVD systems can be used in: graphene preparation, sulfide preparation, nanomaterials preparation and other test sites. A variety of films such as    SiOx, SiNx, amorphous silicon, microcrystalline silicon, nano -silicon, SiC, diamond-like, etc. can be deposited on the surface of flake or similar shape samples, and P -type and N-type doped films can be deposited. The deposited film has good uniformity, compactness, adhesion and insulation. Widely used in cutting tools, high-precision molds, hard coatings, high-end decoration and other fields, PECVD vapor deposition  has a wide range of applications in ultra -large scale integrated circuits, optoelectronic devices, MEMS and other fields.


 

Product Parameters

 

Technical parameters:

	Model number	TN-PECVD-200SST
	Cavity size	Phi 500 -
	Warm zone length	200
	Rf power supply	500W-
	Temperature	1000  ºC
	Pump for forestage	Molecular pump set
	Display type	T
	Warm zone	I-
	Water cooler	CW5200
	Cavity material	SS
	Sample       heating Heating temperature	Above   RT-1000ºC,   temperature   control   accuracy:   ±1.C,   using temperature control meter for temperature control; Adjustable speed: 1-20rpm adjustable
	Spray head size	Φ90mm, the electrode  spacing  between the spray head and the sample 40-100mm  online continuous adjustable (can  be adjusted according to the process), and with a ruler index display
	Sample Table	200mm diameter
	Working vacuum for deposition	0.133-133Pa (can be adjusted according to process)
	Top flange	It can be lifted by motor, the substrate is easy to change, and there is a visual port
Substrate Table			Linear and azimuth motion of the substrate table, substrate heating and temperature control, mounting table and touch screen control, substrate linear motion is manually controlled, and substrate rotation is controlled by DC motors
Vacuum chamber			Front door opening type,  φ500mm X 500mm stainless steel
Observation window			φ100mm with baffle
Mass flowmeter			Six way mass flow meter
Number paths of gas			Six paths
Pressure range			0.15 Mpa to 0.15 Mpa
Range			0 to 100 SCCM (oxygen) 0 to 100 SCCM (CF4) 0 to 200 SCCM (SF6) 0 to 200 SCCM (argon) 0 to 500 SCCM (other gases air) 0-500 SCCM (other gases nitrogen)
Flow control range			Plus or minus 1.5%
Gas path material			304 stainless steel
Pipe joint			6.35mm bushing joint
Vacuum system			Front pump: oil-free vacuum pump 4.7L/S Molecular pump: 1200L/S
Measuring range			1 x 10-5 to 1 x 105Pa
Measurement accuracy			1 x 10-5 ~ 1 x 10-4Pa±40% reading 1 x 10-4 ~ 1 x 105Pa for a reading of ±20%

 

Detailed Photos

Related photos of PECVD Vacuum Furnace



 

 

Company Profile

 

FAQ

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, having our own design team and factory with mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Made in China Trade Guarantee.

Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact me.