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Audited Supplier MPCVD single crystal diamond deposition equipment for laboratory
Application
Preparation of high-quality single crystal diamond, Diamond Grown;
Preparation of high-quality polycrystalline free-standing diamond films;
Preparation of high quality polycrystalline diamond films;
Preparation of various carbon nano films such as graphene, carbon nanotubes, fullerenes and diamond films.
Features:
a. Stainless steel cavity type 10kw microwave plasma equipment, high power density;
b. The water-cooled substrate stage and the water-cooled metal chamber ensure the system can work stably for a long time;
c. The substrate temperature is achieved by microwave plasma self-heating;
d. The vacuum measuring instrument adopts a full-range vacuum gauge, which can accurately measure the background vacuum and working gas pressure;
e. The vacuum pump and valve adopt turbo molecular pump (the ultimate vacuum is 1×10-5Pa) and the rotary vane mechanical vacuum pump (the ultimate vacuum is 1Pa), and the system can automatically control the deposition pressure;
f. Cooling water circulation system to ensure long-term safe and stable operation of the device under high power;
g. 15-inch touch screen, PLC automatic control, can set the temperature or pressure to be constant, can save and reuse up to 20 sets of process files;
H. Fully automatic process control module, which can stably and reliably prepare high-quality diamond films and crystals.
Advantages:
1) High production efficiency, large output, high quality, the size 7*7,8*8,10*10,12*12,15*15 can be installed at one time. It can produce about 250 ~480 carats rough diamonds per month.
2) The equipment has reached industrial production. The molybdenum stage is 90mm large, with fast growth speed, high yield rate and good stability.The precision and quality of the processed components are extremely high, and the processing quality of our equipment is quite exquisite.
3) The equipment is currently the first main equipment at home and abroad that can achieve industrialized production of single crystal diamond. Equipped with advanced production technology to ensure customers produce qualified products.The clarity can reach vs,vvs. The color can reach D,E,F,G level according to customers' requirements.
| eVacuum | Vacuum measurement | Piezoresistive gauge 0.1-100kpa Capacitance gauge 0-1000Pa |
| Operating pressure range | 4-30Kpa | |
| Vacuum leakage rate | <1*10-9 Pa · m 3 / s | |
| Pressure control | Auto-Control | |
| Cavity material | Aluminum alloy excitation chamber, quartz vacuum chamber | |
| Observation window | Temperature measuring hole with diameter of 10mm and observation window of porous hole | |
| Cooling mode | Cooling mode | Water cooling+chamber air cooling |
| Sample table size | Molybdenum stage Φ 85mm, uniform area Φ 50mm | |
| Temperature measurement | Infrared thermometer, range 300-1400 ºC | |
| Cooling water flow | >50L/min | |
| Cooling water temperature | 20-22ºC | |
| Cooling water interface | 1-inch outer wire interface | |
| Operating system | Operating system | PLC control, 15 inch touch screen control |
| Process Menu | 10 process menus, 25 lines for each | |
| Microwave and power supply | Microwave frequency | 2.45±0.1GHz |
| Output power | 1.5-10Kw (equipped with 10kw domestic microwave power supply) | |
| Input power electricity | 380 Ac/50Hz, three-phase five wire (3 * 10+2 * 6 power line),>15Kw | |
| Microwave leakage rate | Microwave leakage rate 5cm away from the equipment ≤ 5Mw/cm2 | |
| Process gas | Flowmeter and interface | H2 (1000SCCM) CH4 (50SCCM) N2 (10SCCM) O2 (10SCCM) 1/4 "VCR female compressed air 8mm Pu tube quick plug |
| The flowmeter can change the type of gas used through software | ||
| Air supply pressure | 0.3-0.35MPa | |
| Compressed air pressure | 0.5-0.6MPa | |
| Vacuum pump | Rotary vane vacuum pump | Oil pump |
| Pumping speed | 4L/S | |
| Power supply | Ac 380V(±10%) | |
| Interface | Air extraction KF25, air exhaust KF25 | |
| Operating environment | Ambient temperature and humidity | The room temperature is lower than 26 ºC and the humidity is lower than 40% |
| Overall dimensions of equipment | Size | 1250(L)×800(W)×2100(H)mm |
| Equipment acceptance conditions: | 1. Equipment installation: After the equipment installation is completed, Party A and Party B shall conduct on-site commissioning, and Party B's technicians shall conduct equipment operation, safety and maintenance training for the person in charge of Party A. | |
| 2. System test: The system can be started and operated normally, and the detached fireball is stable without jumping. | ||
| 3. Microwave leakage: the microwave leakage is less than 5mW/cm2 (the output power of the microwave source is more than 80%, 10cm away from the equipment) | ||
| Item | model | Quantity (set / piece) |
manufacturer or origin | note |
microwave source |
10kW / 2450 MHz |
1 |
domestic |
|
| microwave transmission system | Mixer MPT-2012waveguide |
1 | domestic | |
| mode converter | MPM-2050 | 1 | domestic | |
| microwave reaction cavity | Downstream MPP-2050 |
1 | domestic | |
| sample table and bracket system | N / A |
1 |
domestic |
Water cooling, one layer lifting |
gas flow system |
5 gas mass flow controller: H2, CH4, O2, N2, Ar |
5 |
Japan |
|
| gas vacuum valve and filter | 1 set | Japan | ||
| Gas system connection components | 1 set | Japan | ||
| vacuum system | vacuum valve and filter | 1 | Japan | |
| vacuum cavity, vacuum tube | 1 | domestic | ||
| mechanical pump and vacuum valve | 1 | domestic | ||
| molecular pump and supporting vacuum valve | domestic |
|||
measure |
resistance vacuum meter | 1 | domestic | |
| film vacuum meter | 1 | domestic | ||
| infrared thermometer | 1 | domestic | ||
| electric control system | PLC | 1 | Germany | |
| touch screen | 1 | domestic | ||
| water cooling system | cooling water temperature, flow monitoring |
3 |
Japan |
|
| Control box / cabinet | 1 | domestic | ||
| voltage stabilizing power supply | Requires user configuration | |||
| circulation chiller | Requires user configuration | |||
| gas cylinder, stainless steel gas pipe, water pipe, power distribution, exhaust pipe |
Requires user installation |
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