• Desktop Single Target Magnetron Sputtering Coater with Stainless Steel Cavity
  • Desktop Single Target Magnetron Sputtering Coater with Stainless Steel Cavity
  • Desktop Single Target Magnetron Sputtering Coater with Stainless Steel Cavity
  • Desktop Single Target Magnetron Sputtering Coater with Stainless Steel Cavity
  • Desktop Single Target Magnetron Sputtering Coater with Stainless Steel Cavity
  • Desktop Single Target Magnetron Sputtering Coater with Stainless Steel Cavity

Desktop Single Target Magnetron Sputtering Coater with Stainless Steel Cavity

After-sales Service: 12 Months
Warranty: 12 Months
Type: Coating Production Line
Coating: Vacuum Coating
Substrate: Steel
Certification: CE
Gold Member Since 2023

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Henan, China
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  • Overview
  • Product Description
  • Product Parameters
  • Detailed Photos
  • FAQ
Overview

Basic Info.

Model NO.
Magnetron Sputtering coater
Condition
New
Cooling Mode
Water Cooling
Heating Temperature
Max 500ºC
Rotate Speed
1-20rpm Adjustable
Substrate Size
Diameter 185mm
Vacuum Chamber
Stainless Steel
Magnetron Sputtering Target Head
1 Magnetron Sputtering Heads
Sample Stage Size
100mm
Rotated Speed
1-20 Rpm (Adjustable)
The Highest Heating Temperature
500ºC
Temperature Control Accuracy
+/- 1.0 °c
Ank Capacity
9L
Vacuum Pump
a Set of Molecular Pump System, Using One-Button O
Cooling System
10L/Min
Transport Package
Fumigated Wooden Box
Specification
550*350*400
Trademark
TN
Origin
China
HS Code
8486209000
Production Capacity
200/Month

Product Description

Desktop single target magnetron sputtering coater with stainless steel cavity

Product Description

This equipment is a single-target magnetron sputtering coater,it can be used in the preparation of metal film,and also used in electronic fields,optical fields,special field of ceramic preparation ,it surely can be used in SEM sample preparation in laboratory.
This set is single-target magnetron sputtering coater equipped with high vacuum stainless steel cavity, the cavity is set with a quartz observation window baffle, which is easy to observe and record the experiment; The cavity design with excellent vacuum performance and small shape makes it very suitable for laboratory use. At the same time, the equipment is equipped with a rotating heating sample table, which can effectively improve the film uniformity and film quality. The machine adopts modular design, simple operation logic, and intuitive operation interface, easy to get started.  

Product Parameters

Technical parameters of single target magnetron sputtering coater:
 

Product Name Desktop single-target magnetron sputtering coater with stainless steel cavity
Product Model CY-MSP190S-1T-A
Installation Condition 1,Working environment temperature: 25ºC±15ºC,humidity: 55%Rh±10%Rh;
2,Equipment power supply:AC220V,50Hz, must be well grounded;
3,Rated power:1000w;
4,Equipment for gas:The equipment chamber should be filled with argon gas for cleaning. The customer should prepare argon gas with purity ≥99.99%.
5,Table size requirements: 600mm×600mm×700mm,bearing capacity ≥ 50kg;
6,The position should be well ventilated and cooled.
Technical Indicators
  1. Sputtering power supply:DC power supply 300W;maximum output voltage 600V,limited current output 500mA
  2. Magnetron target:2 inch balance target,magnetic coupling baffle;
  3. Suitable target material: φ50mm x 3mm in thickness
  4. Cavity size :outside diameter194,inside diameter186mm x height 230mm
  5. Cavity material: 304 stainless steel
  6. Rotating heating sample table:rotate speed 1~20rpm  continuously adjustable;maximum heating temperature 500ºC,the lowest recommended heating rate 10ºC/min,the highest recommended heating rate 20ºC/min.
  7. Cooling mode :magnetic target and molecular pump require circulating water cooler
  8. Water-cooling machine:the tank volume 9L,flow rate 10L/min
  9. Gas supply system:mass flow meter, type of gas Argon,flow 1~30sccm(customizable)
  10. Accuracy of flow meter :±1.5% measuring range
  11. The air pumping interface of the vacuum chamber is KF25
  12. Air intake interface is 1/4 inch double ferrule joint
  13. Touch screen is 7inch color touch screen
  14. Adjustable sputtering current,sputtering safety current value and safety vacuum value can be set;
  15.  safety protection: over current, vacuum is too low automatically cut off the sputtering current
  16. Ultimate vacuum:5E-4Pa(matching molecular pump);
  17. Vacuum measurement is Parana vacuum gauge ,the range is:1~105Pa
Notice 1,Magnetron sputtering has a high working vacuum, generally within 2Pa, and needs to be used with molecular pump. 
2,In order to achieve a high oxygen free environment, the vacuum chamber should be cleaned at least 3 times with high purity inert gas.
3,Magnetron sputtering is sensitive to the air intake, so mass flow meter is needed to control the air intake
Optional accessory
Film
thickness Monitor
1,Film thickness resolution:0.0136Å(aluminum)
2,Accuracy of film thickness :±0.5%,it depends on process conditions, especially sensor position, material stress, temperature and density  
3,Measuring speed:100ms-1s/times,measurement range can be set :500000Å(aluminum)
4,Standard sensor crystal:6MHz
5,Suitable for wafer frequency:6MHz
suitable for wafer size:Φ14mm
mounting flange:CF35
Another Accessory  1,CY-CZK103 series high performance molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~105Pa)CY-GZK60 series small molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~102Pa)
VRD-4 bipolar rotary vane vacuum pump
2,KF25 Vacuum bellows; The length can be 0.5m, 1m or 1.5m. KF40 clamp bracket
3,Film thickness meter crystal oscillator;

 

Detailed Photos

Desktop Single Target Magnetron Sputtering Coater with Stainless Steel CavityDesktop Single Target Magnetron Sputtering Coater with Stainless Steel CavityDesktop Single Target Magnetron Sputtering Coater with Stainless Steel CavityDesktop Single Target Magnetron Sputtering Coater with Stainless Steel Cavity

 

 

 
 
FAQ

 


Desktop Single Target Magnetron Sputtering Coater with Stainless Steel Cavity
Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have our own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact us.

Desktop Single Target Magnetron Sputtering Coater with Stainless Steel CavityDesktop Single Target Magnetron Sputtering Coater with Stainless Steel CavityDesktop Single Target Magnetron Sputtering Coater with Stainless Steel CavityDesktop Single Target Magnetron Sputtering Coater with Stainless Steel CavityDesktop Single Target Magnetron Sputtering Coater with Stainless Steel CavityDesktop Single Target Magnetron Sputtering Coater with Stainless Steel CavityDesktop Single Target Magnetron Sputtering Coater with Stainless Steel Cavity
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