After-sales Service: | on-Line Service |
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Warranty: | One Year |
Application: | Industry, School, Lab |
Customized: | Customized |
Certification: | CE |
Structure: | Portable |
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Laboratory Quartz Tube PECVD Furnace with Resistance Wire and Vacuum System
Specifications of PECVD
RF power supply |
Signal frequency |
13.56MHz±0.005% |
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Power output range |
0~300W |
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Maximum reflected power |
100W |
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Reflected power (at maximum power) |
<3W |
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Power stability |
±0.1% |
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Tube furnace |
Tube material |
High purity quartz |
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Outer diameter of tube |
100mm |
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Tube length |
1200mm |
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Furnace chamber length |
440mm |
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Heating zone length |
200mm+200mm (two temperature zone) |
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Constant temperature zone length |
200mm |
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Continuous working temperature |
Max.1100ºC |
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Temperature control accuracy |
±1ºC |
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Temperature control mode |
30 segment program temperature control |
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Display mode |
LCD |
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Sealing method |
304 stainless steel vacuum flange |
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Gas supply system |
Model |
CY-6Z |
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Channel numbers |
6 |
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Measuring unit |
Mass flow controller |
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Measuring range |
A channel: 0~200SCCM for H2 |
Remarks: If other ranges are required, please specify when ordering. According to the customer's specific requirements, the flow meter of corresponding gas type and range is optional. |
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B channel: 0~200SCCM for CH4 |
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C channel: 0~200SCCM for C2H4 |
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C channel: 0~500SCCM for N2 |
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D channel: 0~500SCCM for NH3 |
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E channel: 0~500SCCM for Ar |
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Measurement accuracy |
±1.5%F.S |
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Working pressure difference |
-0.15Mpa~0.15Mpa |
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Connecting pipe |
304 stainless steel |
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Gas channel |
304 stainless steel needle valve |
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Interface specification |
1/4" ferrule connector for gas inlet and outlet |
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Vacuum system |
Mechanical pump |
Double-stage rotary vane pump |
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Pumping rate |
1.1L/S |
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Vacuum measurement |
Resistance gauge |
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Ultimate vacuum |
1.0E-1Pa |
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Pumping interface |
KF16 |
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Sliding rail |
Can achieve the sliding of two temperature zone furnace, to realize rapid temperature rise and fall. |
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Power supply |
AC220V 50Hz |
1. WE have CVD/PECVD machine with gas supply system+vacuum system+tube furnace + plasma generator.
2. Tube furnace (temperature) :1200C, 1400C, 1600C, customized temperature is avaliable.
3. Tube furnace (heating zone) :single zone, dual zone, triple zone, customized No. of heating zone is avaliable.
4. Tube Material: quartz, corundum, alloy, and other material of tube is customizable.
5. Tube with different diameter and length is customizable.
6. Plasma generator: 100W, 150W, 300W, 500W, 1000W, and other power of plasma generator is customizable.
7. Flowmeter: 1~3 or multi channel flow meter is optional based on your process.
CVD/PECVD-- tube furnace with 1200C triple heating zone
PECVD-- roll- to- roll
PECVD-- rotary type
We can ship the CVD, PECVD machine by sea, by air, by land and by Express, also we can arrange shipment according to your requirements.
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
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