Lab Magnetron Sputtering Coater with Transition Cabin for Sem Specimen

• After-sales Service: on-Line Service
• Warranty: One Year
• Type: Magnetron Sputtering
• Coating: Vacuum Coating
• Certification: CE
• Condition: New
• Model NO.: TN-MSH325G-III-DCDCRF-SS
• Product Name: Magnertron Sputter Coater
• Coating Method: Magnetron Sputtering
• DC Power: 500W*2
• RF Power: 500W*1
• Chamber Size: 325*510mm
• Substrate Size: 150mm
• Substrate Heating: Max. 500c
• Target Size: 2 Inch*3
• Power Supply: AC 220V
• Rotary Vane Pump: 1.1L/S
• Turbo-Molecular Pump: 600L/S
• Chamber Material: SS304
• Transport Package: Fumigated Wooden Box
• Specification: 600*650*1280mm
• Trademark: TN
• Origin: China
• Production Capacity: 20 Sets Per Month

Product Description

Lab Magnetron Sputtering Coater with transition cabin for Sem Specimen

Product Description

MAGNETRON SPUTTERING: OVERVIEW

Sputtering is a plasma based deposition process in which energetic ions are accelerated towards a target. The ions strike the target and atoms are ejected (or sputtered) from the surface. These atoms travel towards the substrate and incorporate into the growing film.

Features of magnetron sputtering coater:

1. Triple target magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment. It is standardized, modular and customizable.

2. There are 1-inch, 2-inch and 3-inch magnetron targets. You can choose the target according to the size of the substrate to be coated.

3. The magnetron sputtering coater is equipped with 500W DC power and 500W RF power. The DC power is used for the conductrive materials, and the RF power is used for the insulating materials. Power from 300W to 1000W in according to your requirements.

4. The magnetron sputtering coater is equipped with two-channel high-precision mass flowmeter. Four-channel mass flowmeters is
    available

5. The magnetron sputtering coater is equipped with turbo-molecular pump, and the ultimate vacuum is up to 10E^-5Pa, other types of molecular pumps are available for purchase.

6. Molecular pump gas path is controlled by multiple solenoid valves, you can open the chamber to take out the sample without
    shutting down the pump.

7. This product can be equipped with an integrated industrial computer to control the system.

Product Parameters

Specifications of magnetron sputtering coater:

Working Voltage		VAC 220, 60Hz
Sputtering Vacuum Chamber		Dimension: ~ φ325xH510mm Material: 304 stainless steel Inner wall processing: electrolytic polishing Sealing method: Fluorine rubber seal Viewport (window): ~4'' (100mm) with shutter
Sample Holder		Center bottom setting sample holder, with one shutter Sample holder: Dia. 150mm Rotary speed: 0~20rpm adjustable Heating temperature: RT~ 500^oC
Magnetron Sputtering Gun		Quantity: 3 sets Adjustable angle -45°~45° Sputtering orientation downwards Target dimension: diameter 2'', thickness max.3mm
Quartz Crystal Monitor		Channel numbers: One-channel Accuracy: 0.1Ã Measurement speed: 100mS-1S adjustable Measurement range: 500 000Ã (Aluminum as a reference) Standard sensor quartz crystal: 6MHz
Vacuum System	Backing Pump	Double-stage rotary vane pump Pumping rate: 1.1L/s
	Molecular Pump	Pumping rate: 600 L/s Rated rotating speed: 27000rpm Starting time: <5min Cooling method: water cooling Vacuum degree: 5*10^-4Pa
	Composite Vacuum Gauge	Resistance gauge + ionization gauge Measuring range: 10^-5Pa ~ 10^5 Pa
DC Power Supply		Quantity: 2 sets Output power: 0~500W Output voltage: 0~600V Maximum output current: 1A Starting time: 1~10s
RF power supply		Quantity: 1 set Output power: 0~500W RF frequency: 13.56 MHz Matching method: automatch Reflected power: <=100W Power stability: ±0.1%
Mass Flow Controller		One-channel MFC for Ar gas Measuring range: 0~200sccm
Water Cooler		Flow rate: 10L/min Power: 0.1KW Cooling power: 50W/ºC Tank capacity: 9L
Control		PLC automatic control
Transition chamber		The chamber size will be for max. 4inch wafers. Equipped with one compact molecular pump group Backing pump: VRD-4, pumping speed: 1.1L/s Model of molecular pump: TG60F Pumping speed of molecular pump: 60L/s

 

Detailed Photos

1. WE have magnetron sputtering coater with 1 target, 2 targets, 3 targets, 4 tagrst, etc. Target can be designed at the top or bottom of the chamber.
2. 0-1000W DC power or RF power target is available. Bias function is optional.
3. Target size: 1-inch, 2-inch, 3-inch, 4-inch, etc.
4. Strong magnetic target and Pernanent magenetic target is optional.
5. Magnetron sputtering coater with evaporation, E-beam is available.
6. Customized service is always available!

Company Profile

Packaging & Shipping

WE can ship the magnetron sputtering coater by land, by sea, by air, by express, also can arrange package and shipment according to your requirements.

FAQ

Q. Are you manufacturer or trading company?
A. We are professional manufacturer of  laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service. 

Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.

Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.

Q. How to pay?
A. T T, L / C, D / P, etc.

Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
 

Contact Us

IS MAGNETRON SPUTTERING THE RIGHT PROCESS FOR YOUR WORK?
Please get in touch and we can collaborate on your project.

How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.