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Desktop thermal evaporation coater with electric lifting sample platform is a small desktop evaporation coater ,which is installed with tungsten basket evaporation source ,it can provide a maximum of 100A coating current,the maximum evaporating temperature up to 1800ºC,and can meet the evaporation of a variety of common metal and part of non-metal. The vacuum chamber is made of stainless steel and has been degassed before delivery. It can reach the limit vacuum of 5x10-5Pa with the molecular pump group, which can meet the vacuum environment required by the evaporation of most materials; At the same time, the equipment adopts the design of high tank and water-cooled sample platform, which can reduce the heat radiation of the evaporation source to the sample, ensure the surface of the sample is not over temperature and maintain at room temperature .It can effectively prevent the sample from being damaged by the high temperature of heat evaporation, especially suitable for the coating of various polymer film samples.
Desktop thermal evaporation coater technical parameter:
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Product Name |
Desktop thermal evaporation coater with electric lifting sample platform |
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Product Model |
CY-EVP195S-1S-LT(T means tall tank ;L means lift) |
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Installation Condition |
1,Working environment temperature: 25ºC±15ºC,humidity: 55%Rh±10%Rh;
2,Equipment power supply:AC220V,50Hz, must be well grounded;
3,Rated power:2500w;
4,Equipment for gas :The equipment chamber should be filled with argon gas for cleaning. The customer should prepare argon gas with purity ≥99.99%.
5,Table size requirements: 600mm×600mm×700mm,bearing capacity ≥ 70kg;
6,The position should be well ventilated and cooled. |
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Technical Indicators |
1, Number of evaporation sources: 2, each evaporation source is equipped with baffle;
2, Evaporation source voltage: 10V
3, The evaporation current is continuously adjustable from 0 to 100A
4, With 1 tungsten boat,1 tungsten basket;
5, Stainless steel electric lifting sample platform, diameter is 100mm, rotating speed 1~20rpm continuously adjustable;
6, The distance between the sample and the evaporation source is continuously adjustable from 190 to 300mm, and can also be adjusted up and down under the vacuum state;
7, The vacuum cavity is a stainless steel cavity with an outside diameter of 195mm , an inside diameter 185mm and a height of 350mm;
8, The upper cover is sealed with ISO flange for easy disassembly and inspection;
9, The cavity is provided with a front door and a quartz observation window with a baffle ;size ofφ60mm
10, The air pumping interface of the vacuum chamber is KF40;
11, Air intake interface is 1/4 inch double ferrule joint ,stainless steel fine-tuning valve is provided by default to adjust the air intake;
12, Touch screen is 7inch color touch screen;
13, Adjustable sputtering current ,sputtering safety current value and safety vacuum value can be set;
14, safety protection: over current, vacuum is too low automatically cut off the sputtering current;
15, Ultimate vacuum:1Pa(matching double stage rotary vane pump); |
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Notice |
1,In order to give full play to the vacuum performance of the cavity, it is recommended to use it with molecular pump group. |
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Optional accessory |
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Film
thickness Monitor |
1,Film thickness resolution:0.0136Å(aluminum)
2,Accuracy of film thickness :±0.5%,it depends on process conditions, especially sensor position, material stress, temperature and density
3,Measuring speed:100ms to 1s per times ,measurement range can be set :500000Å(aluminum)
4,Standard sensor crystal:6MHz
5,Suitable for wafer frequency:6MHz
suitable for wafer size:Φ14mm
mounting flange:CF35 |
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Another Accessory |
1, tungsten boat, tungsten basket;
2, Organic evaporation source (including quartz boat and tungsten wire heating source)
3, The number of evaporation sources can be selected 1~2 groups;
4, CY-CZK103 series high performance molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~105Pa);
CY-GZK60 series small molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~102Pa)
VRD-4 bipolar rotary vane vacuum pump;
5, CW3000 circulating water cooler(air cooled ,flow rate 10L per minute)
6, KF40 Vacuum bellows; The length can be 0.5m, 1m or 1.5m. KF40 clamp bracket;
7, Film thickness meter crystal oscillator; |
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