Single Heating Zone High Vacuum 1200c Tube CVD Furnace

• After-sales Service: on-Line Service
• Warranty: One Year
• Application: Industry, School, Lab
• Customized: Customized
• Certification: CE
• Structure: Portable
• Model NO.: TN-O1200-50IT
• Material: Stainless Steel
• Type: Tubular Furnace
• Product Name: CVD Tuber Furnace
• Tube Material: High Purity Quartz
• Temperature: 1200c
• Heating Zone: 200mm*1
• Furnace Tube Size: 50*450mm
• Temperature Accuracy: ±1ºC
• Transport Package: Fumigated Wooden Box
• Trademark: TN
• Origin: China
• HS Code: 8401200000
• Production Capacity: 20 Sets Per Month

Product Description

Product Description

Lab Single Heating Zone High Vacuum 1200C Tube CVD Furnace

1. This CVD system is specially designed for graphene production, using a 1200ºC mini tube furnace, equipped with a high-
     precision mass flow meter and a thin-film vacuum gauge.

2. Compared with the conventional Pirani resistance gauge, the reading of the thin film gauge is accurate and not affected by the
    type of gas, which is very suitable for the vacuum coating process.

3. The CVD tube furnace is equipped with a combustible gas detection device, which is linked with a solenoid valve at the air
    outlet. Once there is a leakage, the solenoid valve can be closed to ensure safety.

4. The CVD tube furnace comes with footprint and is very suitable for laboratory preparation of CVD.

Product Parameters

Specifications of CVD with 1200C tube furnace
 

1200ºC Mini CVD Tube Furnace Parameters:
Supply voltage	AC220V, 50Hz
Maximum power	2KW
Heating zone	Single heating zone 200mm
Constant temperature zone length	100mm
Heating element	Heat-resistant alloy wire
Thermocouple	Type K
Operating temperature	≤1150ºC
Heating rate	Suggest ≤10ºC/min
Temperature control accuracy	±1ºC
Temperature control method	AI-PID 30-segment process curve, with overheat and burnout protection
Furnace tube material	High purity quartz
Furnace tube size	φ50mm O.D x 450mm L
Vacuum pump	Mechanical pump  pumping speed 1.1L/s
Ultimate vacuum	5Pa
Three-channel mass flow meter parameters
Valve type	Stainless steel needle valve
Number of gas paths	Three
Pressure range	0.05~0.3MPa
Range	Ar 0~500sccm H2 0~200sccm CH4 0~10sccm
Flow control range	±1.5%
Mixing tank volume	750mL
Gas path material	304 stainless steel
Pipe interface	6.35mm ferrule connector
Power supply	AC220V 50Hz

Detailed Photos

1. WE have CVD/PECVD machine with gas supply system+vacuum system+tube furnace + plasma generator.

2. Tube furnace (temperature) :1200C, 1400C, 1600C, customized temperature is avaliable.

3. Tube furnace (heating zone) :single zone, dual zone, triple zone, customized No. of heating zone is avaliable.

4. Tube Material: quartz, corundum, alloy, and other material of tube is customizable.

5. Tube with different diameter and length is customizable.

6. Plasma generator: 100W, 150W, 300W, 500W, 1000W, and other power of plasma generator is customizable.

7. Flowmeter: 1~3 or multi channel flow meter is optional based on your process.

CVD-- tube furnace with 1200C single heating zone 

PECVD-- tube furnace with triple heating zone 

PECVD-- roll- to- roll
PECVD-- rotary type
 

Other machines:

Company Profile

Packaging & Shipping

We can ship the CVD, PECVD machine by sea, by air, by land and by Express, also we can arrange shipment according to your requirements.

FAQ

Q. Are you manufacturer or trading company?
A. We are professional manufacturer of  laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service. 

Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.

Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.

Q. How to pay?
A. T T, L / C, D / P, etc.

Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.

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