Three Target Magnetron Sputtering Coater with The Transition Chamber

• After-sales Service: 12 Months
• Warranty: 12 Months
• Type: Coating Production Line
• Coating: Vacuum Coating
• Substrate: Steel
• Certification: CE
• Model NO.: Magnetron Sputtering coater
• Condition: New
• Cooling Mode: Water Cooling
• Heating Temperature: Max 500ºC
• Rotate Speed: 1-20rpm Adjustable
• Substrate Size: Diameter 185mm
• Vacuum Chamber: Stainless Steel
• Magnetron Sputtering Target Head: 3 Magnetron Sputtering Heads
• Sample Stage Size: Maximum 4" Substrate Can Be Placed
• Rotated Speed: 1-20 Rpm (Adjustable)
• The Highest Heating Temperature: 500ºC
• Temperature Control Accuracy: +/- 1.0 °c
• Gas Flow Controller: 2 Mass Flow Meters Installed Inside The Instrument
• Vacuum Pump: a Set of Molecular Pump System, Using One-Button O
• Cooling System: 16L/Min.
• Transport Package: Fumigated Wooden Box
• Trademark: TN
• Origin: China
• HS Code: 8486209000
• Production Capacity: 200/Month

Product Description

Three target magnetron sputtering coater with the transition chamber

 

Product Description

This equipment is three target magnetron sputtering coater apparatus, which can be used for the preparation of metal thin films. It has applications in the fields of electronics, optics, and special ceramic preparation. It can also be used for laboratory SEM sample preparation.
The three target magnetron sputtering coater is equipped with three magnetron targets and two sets of DC power supplies, which can be used to coat multilayer conductive metal films. At the same time, the equipment has two parts: a main chamber and a transition chamber. The transition chamber is equipped with a magnetic push rod, and a vacuum gate valve is installed between the two chambers; The user can load samples in the transition chamber while performing sputtering work in the main chamber, and perform vacuum pre-pumping. After the sputtering in the main chamber is completed, the sample can be pushed into the sample stage of the main chamber through the magnetic push rod. Such a design can reduce the number of vacuum pumping times in the main chamber, which not only effectively saves time, but also ensures a better local vacuum and effectively improves the quality of the coating.

 

Product Parameters

Working Voltage		VAC 220, 60Hz
Sputtering Vacuum Chamber		Dimension: ~ φ325xH510mm Material: 304 stainless steel Inner wall processing: electrolytic polishing Sealing method: Fluorine rubber seal Viewport (window): ~4'' (100mm) with shutter
Sample Holder		Center bottom setting sample holder, with one shutter Sample holder: Dia. 150mm Rotary speed: 0~20rpm adjustable Heating temperature: RT~ 500^oC
Magnetron Sputtering Gun		Quantity: 3 sets Adjustable angle -45°~45° Sputtering orientation downwards Target dimension: diameter 2'', thickness max.3mm
Quartz Crystal Monitor		Channel numbers: One-channel Accuracy: 0.1Ã Measurement speed: 100mS-1S adjustable Measurement range: 500 000Ã (Aluminum as a reference) Standard sensor quartz crystal: 6MHz
Vacuum System	Backing Pump	Double-stage rotary vane pump Pumping rate: 1.1L/s
	Molecular Pump	Pumping rate: 600 L/s Rated rotating speed: 27000rpm Starting time: <5min Cooling method: water cooling Vacuum degree: 5*10^-4Pa
	Composite Vacuum Gauge	Resistance gauge + ionization gauge Measuring range: 10^-5Pa ~ 10^5 Pa
DC Power Supply		Quantity: 2 sets Output power: 0~500W Output voltage: 0~600V Maximum output current: 1A Starting time: 1~10s
RF power supply		Quantity: 1 set Output power: 0~500W RF frequency: 13.56 MHz Matching method: automatch Reflected power: <=100W Power stability: ±0.1%
Mass Flow Controller		One-channel MFC for Ar gas Measuring range: 0~200sccm
Water Cooler		Flow rate: 10L/min Power: 0.1KW Cooling power: 50W/ºC Tank capacity: 9L
Control		PLC automatic control
Transition chamber		The chamber size will be for max. 4inch wafers. Equipped with one compact molecular pump group Backing pump: VRD-4, pumping speed: 1.1L/s Model of molecular pump: TG60F Pumping speed of molecular pump: 60L/s

 

Detailed Photos

 

FAQ

 

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have our own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact us.

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