Roll to Roll Pecvd Machine for Graphene Preparation

• After-sales Service: on-Line Service
• Warranty: One Year
• Application: Industry, School, Lab
• Customized: Customized
• Certification: CE
• Structure: Portable
• Model NO.: TN-OTF-1200X-III-PE300-RR
• Material: Stainless Steel
• Type: Tubular Furnace
• Product Name: Pecvd Machine
• Tube Material: High Purity Quartz
• Temperature: 1200c
• Heating Zone: 200mm*1
• Furnace Tube Size: 50*450mm
• Temperature Accuracy: ±1ºC
• Transport Package: Fumigated Wooden Box
• Trademark: TN
• Origin: China
• HS Code: 8401200000
• Production Capacity: 20 Sets Per Month

Product Description

Product Description

Roll to roll PECVD machine for Graphene Preparation

PECVD with roll to roll system

1. The instrument is a plasma enhanced chemical vapor deposition device (PECVD) equipped with a roll-to-roll movement system.
    It is not only used in the continuous heat treatment process of wire rod, such as the preparation of carbon fiber, the modification
    of alloy and other materials wire rod, but also used for the continuous growth of graphene on the coil.

2. The PECVD system has five parts: roll-to-roll movement system, 1200ºC*2-heating-zone open tube furnace, PE plasma
    enhancement system, vacuum system and three-way proton flowmeter gas supply system. The whole system can work in the
    vacuum / atmosphere protection environment.

3. The speed of the winding device can be adjusted from 1 to 400mm / min, and the mechanism adopts feedback adjustment,
    which can automatically correct the speed deviation and ensure the speed stability of the sample, thus ensuring the accuracy of
    the experiment.

Product Parameters

Specifications of roll-to-roll PECVD system
 

1200ºC2-heating-zone open tube furnace	Item	Detail
	Voltage	AC220V,50Hz
	Max power	3KW
	Heating zone	Dual zones 200mm+200mm
	Working temperature	≤1200ºC
	Temperature control accuracy	±1ºC
	Temperature control method	AI-PID 30-stage process curve, can store multiple
	Tube material	High purity quartz
	Tube size	φ80mm I.D x 1400mm L
	Sealing mode	Stainless steel vacuum flange
	Vacuum measurement	Resistance gauge
	Working gas	Non-corrosive gases such as hydrogen, nitrogen, argon, and oxygen
	Vacuum pump	Bipolar rotary vane vacuum pump
	Ultimate vacuum	10^-1Pa
Three-way mass flowmeter	Item	Detail
	Valve type	Stainless steel needle valve
	Gas channels	Three-way
	Pressure range	0.05~0.3MPa
	Range	0~100 SCCM (Ar) 0~200 SCCM(H2) 0~500 SCCM(CH4)
	Flow control range	±1.5%
	Mixing tank volume	750mL
	Gas path material	304 stainless steel
	Pipe interface	6.35mm Bite type joint
	Power supply	AC220V 50Hz
RF power	Item	Detail
	Output Power	500W
	Output accuracy	±1%
	RF frequency	13.56MHz
	RF stability	±0.005%
	Cooling method	Water cooling

Detailed Photos

1. WE have CVD/PECVD machine with gas supply system+vacuum system+tube furnace + plasma generator.

2. Tube furnace (temperature) :1200C, 1400C, 1600C, customized temperature is avaliable.

3. Tube furnace (heating zone) :single zone, dual zone, triple zone, customized No. of heating zone is avaliable.

4. Tube Material: quartz, corundum, alloy, and other material of tube is customizable.

5. Tube with different diameter and length is customizable.

6. Plasma generator: 100W, 150W, 300W, 500W, 1000W, and other power of plasma generator is customizable.

7. Flowmeter: 1~3 or multi channel flow meter is optional based on your process.

CVD-- tube furnace with 1200C single heating zone 

PECVD-- tube furnace with triple heating zone 

PECVD-- roll- to- roll
PECVD-- rotary type
 

Other machines:

Company Profile

Packaging & Shipping

We can ship the CVD, PECVD machine by sea, by air, by land and by Express, also we can arrange shipment according to your requirements.

FAQ

Q. Are you manufacturer or trading company?
A. We are professional manufacturer of  laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service. 

Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.

Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.

Q. How to pay?
A. T T, L / C, D / P, etc.

Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.

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