Lab Coating Machine with Magnetron Target and Vibration Table

• After-sales Service: 12 Months
• Warranty: 12 Months
• Type: Coating Production Line
• Coating: Vacuum Coating
• Substrate: Steel
• Certification: CE
• Model NO.: Magnetron Sputtering coater
• Condition: New
• Cooling Mode: Water Cooling
• Heating Temperature: Max 500ºC
• Rotate Speed: 1-20rpm Adjustable
• Substrate Size: Diameter 185mm
• Vacuum Chamber: Stainless Steel
• Magnetron Sputtering Target Head: 3 Magnetron Sputtering Heads
• Sample Stage Size: Maximum 4" Substrate Can Be Placed
• Rotated Speed: 1-20 Rpm (Adjustable)
• The Highest Heating Temperature: 500ºC
• Temperature Control Accuracy: +/- 1.0 °c
• Gas Flow Controller: 2 Mass Flow Meters Installed Inside The Instrument
• Vacuum Pump: a Set of Molecular Pump System, Using One-Button O
• Cooling System: 16L/Min.
• Transport Package: Fumigated Wooden Box
• Specification: 290mmx365mmx260mm
• Trademark: TN
• Origin: China
• HS Code: 8486209000
• Production Capacity: 200/Month

Product Description

Three 2-inch target heads DC&RF
magnet sputtering coating machine for lab

Brief-introduction
Three target magnetron sputtering coating instrument is a cost-effective magnetron sputtering coating equipment independently developed by our company, which has the characteristics of standardization, modularization and customization.

The equipment can be used to prepare single-layer or multi-layer ferroelectric films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, polytetrafluoroethylene films, etc.

DC power supply can be used for the preparation of metal films, RF power supply can be used for the preparation of non-metallic films, and the three targets can meet the needs of multi-layer or multiple coating. Compared with similar equipment, the three-target magnetron sputtering coating instrument is not only widely used, but also has the advantages of small volume and easy operation. It is an ideal equipment for preparing material films in the laboratory.

 Technical parameters

Three target magnetron sputtering coating  machine (DC power supply + RF power supply)
Sample table	Sputtering mode	Sputtering orientation upwards, the sample stage is located above the sputtering target; Center top setting sample holder, with one shutter
	Sample holder	φ150mm
	Control accuracy	±1ºC
	Heating range	Room   temperature~500ºC
	Adjustable speed	1-20rpm   adjustable
	Target base distance adjustable	The distance   between the target and the substrate can be adjusted electrically
Magnetron target gun	Target plane	Circular plane   target
	Sputtering   vacuum	10Pa~0.2Pa
	Target   diameter	50~50.8mm
	Target   thickness	2~5mm Note: if the target is magnetic material (such as Fe, Co, Ni), the  thickness cannot be more than 1.5mm, and strong magnetic sputtering gun is required,   will need extra charge.
	Insulation voltage	>2000V
	Quantity	2 inches*3;with shutters   for each gun
	Cable   specification	SL-16
	Target head   temperature	<=65ºC
Vacuum  chamber	Inner wall   treatment	Electrolytic polishing
	Chamber size	φ300mm × 350mm
	Chamber   material	304 stainless   steel
	Observation   window	Quartz window, diameter φ100mm with shutter
	Sealing method	Viton seal
	Open method	Top opening, cylinder auxiliary support
Gas control system	Flow control	1-way mass   flow meter: Oxygen: range   0~100SCCM or Argon gas:   range 0~200SCCM or Nitrogen: range 0~500SCCM (Note: In order to achieve a higher oxygen-free   environment, the vacuum chamber must be cleaned with high-purity inert gas at   least 3 times.)
	Gas type	Argon, nitrogen, oxygen, and other inert gases
	Control valve   type	Solenoid valve
	Control valve   static state	Normally   closed
	Measuring   linearity	±1.5% F.S
	Measurement repeatability	±0.2% F.S
	Measuring   response time	≤8 seconds(T95)
	Working   pressure range	0.3MPa
	Valve body   pressure	3MPa
	Working   temperature	(5~45)ºC
	Body material	Stainless steel 316L
	Valve body   leakage rate	1×10-8Pa.m3/s
	Pipe joints	1/4″Compression fitting
	Input and   output signal	0~5V
	Power supply	±15V(±5%)(+15V  50mA,    -15V 200mA)
	Overall   dimensions (mm)	130 (width) ×   102 (height) × 28 (thickness)
	Communication   Interface	RS485 MODBUS protocol
DC power supply	Power supply	500W
	Output voltage	0~600V
	Maximum output   current	1A
	Timing length	65000 S
	Starting time	1~10 S
	Quantity	2 sets
RF power supply	Power supply	500W
	Power output   range	0W-500W, with auto match
	Maximum  reflected power	100W
	RF frequency	13.56MHz+/-0.005%   stability
	Power   stability	≤5W
	Harmonic   component	less than   -50dbc
	Quantity	1 set

 

Company Profile

 

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, having our own design team and factory with mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

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Any questions about our spin coater, please contact us