Lab Dual Heads RF DC Magnetron Sputtering Coater for PTFE Thin Films

• After-sales Service: on-Line Service
• Warranty: One Year
• Type: Magnetron Sputtering
• Coating: Vacuum Coating
• Substrate: Steel
• Certification: CE
• Model NO.: TN-MSP300S-RFDC
• Condition: New
• Product Name: Magnertron Sputter Coater
• Coating Method: Magnetron Sputtering
• Target Power: DC 500W
• Chamber Size: 300*300mm
• Substrate Size: 150mm
• Substrate Heating: Max. 500c
• Target Size: 2inch*2
• Power Supply: AC 220V
• Rotary Vane Pump: 1.1L/S
• Thermal Evaporation: 1500c
• Chamber Material: SS304
• Transport Package: Fumigated Wooden Box
• Specification: 550*350*500mm
• Trademark: TN
• Origin: China
• Production Capacity: 20 Sets Per Month

Product Description

Product Description

MAGNETRON SPUTTERING: OVERVIEW

Sputtering is a plasma based deposition process in which energetic ions are accelerated towards a target. The ions strike the target and atoms are ejected (or sputtered) from the surface. These atoms travel towards the substrate and incorporate into the growing film.

Lab Dual Heads RF DC Magnetron Sputtering Coater for PTFE Thin Films

1. Compared with the conventional plasma sputtering, magnetron sputtering has the advantages of high energy, high speed, high deposition rate and low sample temperature rise;

2. The magnetron target is equipped with water-cooled interlayer. The water cooler can effectively take away heat and avoid heat accumulation on the target surface, so that the magnetron coating can work stably for a long time;

3. This model adopts the layout of under target, the sample table is on the top, and the height with the target surface can be precisely adjusted by program, and can be rotated and heated, with excellent performance.

Product Parameters

Specifications of dual target magnetron sputtering coater

Sample stage	Size	φ185mm	Temperature control accuracy	±1ºC
	Heating temperature	Max 500ºC	Rotate speed	1-20rpm adjustable
Magnetron Sputtering   target head	Quantity	2"×2 (1",2" optional)	Water chiller	Circulating water chiller   with flow rate of 10L/min
	Cooling mode	Water cooling
Vacuum chamber	Chamber size	φ300mm×300mm	Watch window	φ100mm
	Chamber material	Stainless steel	Opening mode	Top cover open
Mass flowmeter	2 channels; measuring range 100SCCM; 100SCCM (can be customized according to customer needs)
Vacuum system	Model	CY-GZK103-A	Pumping interface	KF40
	Molecular pump	CY-600	Exhaust interface	KF16
	Backing pump	rotary vane pump	Vacuum measurement	Compound vacuum gauge
	Ultimate vacuum	1.0E-5Pa	Power supply	AC;220V 50/60Hz
	Pumping rate	Molecular pump:   600L/S  rotary vane pump: 1.1L/S   Comprehensive gas pumping performance:   vacuum up to 1.0E-3Pa in 20 minutes
Power configuration	Quantity	DC power supply×1 RF power supply×1	Max output power	DC 500W, RF 300 W
Other parameters	Supply voltage	AC220V,50Hz	Overall size	600mm×650mm×1280mm
	Total power	2.5KW	Total Weight	About 300kg

Detailed Photos

1. WE have magnetron sputtering coater with 1 target, 2 targets, 3 targets, target can be designed at the top or bottom of
    the chamber.
2. DC or RF target is available.
3. Different target material is optional
4. Strong magnetic target and Pernanent magenetic target is optional
5. Magnetron sputtering coater with evaporation source is available
6. Customized service is always available!

Dual target sputtering coater with 2 DC power

Dual target magnetron sputtering coater with reciprocating sample stage

Dual target magnetron sputtering coater with bottom target

Dual target sputtering coater with thermal evaporation source

Dual target sputtering coater with DC and RF power supply and UPS

Company Profile

Packaging & Shipping

WE can ship the magnetron sputter coater by land, by sea, by air, by express, also can arrange package and shipment according to your requirements.

FAQ

Q. Are you manufacturer or trading company?
A. We are professional manufacturer of  laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service. 

Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.

Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.

Q. How to pay?
A. T T, L / C, D / P, etc.

Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
 

Contact Us

IS MAGNETRON SPUTTERING THE RIGHT PROCESS FOR YOUR WORK?
Please get in touch and we can collaborate on your project.

How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.