High Temperature 1200 Degrees Dual Zones CVD/Heat Treatment Tube Furnace

• After-sales Service: on-Line Service
• Warranty: One Year
• Application: Industry, School, Lab
• Customized: Customized
• Certification: CE
• Structure: Portable
• Model NO.: TN-1200X-III-50IC
• Material: Stainless Steel
• Type: Tubular Furnace
• Product Name: CVD Tuber Furnace
• Tube Material: High Purity Quartz
• Temperature: 1200c
• Heating Zone: 200mm*1
• Furnace Tube Size: 50*450mm
• Temperature Accuracy: ±1ºC
• Transport Package: Fumigated Wooden Box
• Trademark: TN
• Origin: China
• HS Code: 8401200000
• Production Capacity: 20 Sets Per Month

Product Description

Product Description

High Temperature 1200 Degrees Dual Zones CVD/Heat Treatment Tube Furnace

1. This CVD system is specially designed for graphene production, using a 1200ºC mini tube furnace, equipped with a high-
    precision mass flow meter and a thin-film vacuum gauge.

2. Compared with the conventional Pirani resistance gauge, the reading of the thin film gauge is accurate and not affected by the
    type of gas, which is very suitable for the vacuum coating process.

3. The CVD tube furnace is equipped with a combustible gas detection device, which is linked with a solenoid valve at the air
    outlet. Once there is a leakage, the solenoid valve can be closed to ensure safety.

4. The CVD tube furnace comes with footprint and is very suitable for laboratory preparation of CVD.

Product Parameters

Specifications of CVD with 1200C tube furnace
 

Vacuum tube furnace	Model	TN-1200X-III-50IC
	Tube material	High purity quartz
	Tube diameter	50mm
	Tube length	1000mm
	Furnace chamber length	660mm
	Heating zone length	200mm+200mm+200mm
	Operating temperature	0~1100ºC
	Temperature control accuracy	±1ºC
	Temperature control mode	30 or 50 segment program temperature control
	Display mode	LED (highlight digital tube display)
	Sealing method	304 stainless steel vacuum flange
	Flange interface	1/4" cutting sleeve joint (Ø8 pagoda joint)
	Vacuum	4.4×10E^-3Pa
	Power supply	AC:220V 50/60Hz
Gas supply system	Model	TN-3F
	Gas channel	3-channel
	Measuring unit	Gas float flowmeter
	Measuring range	A channel: 0~100ml H2 gas	The flow meter of the corresponding gas type and range can be selected according to customer's requirements
		B channel: 16~160ml N2 gas
		C channel: 25~250ml Ar gas
	measurement accuracy	±2.0%
	Pipe pressure resistance	3MPa
	Working pressure difference	50~500KPa
	Connecting pipe	304 stainless steel
	Gas channel	304 stainless steel needle valve
	Interface specification	1/4" cutting sleeve joint for gas inlet and outlet
Exhaust system	Mechanical pump	GHD-031B
	Pumping rate	4L/S
	Exhaust interface	KF16
	Vacuum measurement	Pirani gauge
	Ultimate vacuum	1×10E-1Pa
	Power supply	AC:220V 50/60Hz
	Pumping interface	KF40

 

Detailed Photos

1. WE have CVD/PECVD machine with gas supply system+vacuum system+tube furnace + plasma generator.

2. Tube furnace (temperature) :1200C, 1400C, 1600C, customized temperature is avaliable.

3. Tube furnace (heating zone) :single zone, dual zone, triple zone, customized No. of heating zone is avaliable.

4. Tube Material: quartz, corundum, alloy, and other material of tube is customizable.

5. Tube with different diameter and length is customizable.

6. Plasma generator: 100W, 150W, 300W, 500W, 1000W, and other power of plasma generator is customizable.

7. Flowmeter: 1~3 or multi channel flow meter is optional based on your process.

CVD-- tube furnace with 1200C single heating zone 

CVD / PECVD-- tube furnace with 1200C triple heating zone 

PECVD-- roll- to- roll
PECVD-- rotary type

Disulfide MOS2 CVD System

DCCVD system
HPCVD system

Company Profile

Packaging & Shipping

We can ship the CVD, PECVD machine by sea, by air, by land and by Express, also we can arrange shipment according to your requirements.

FAQ

Q. Are you manufacturer or trading company?
A. We are professional manufacturer of  laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service. 

Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.

Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.

Q. How to pay?
A. T T, L / C, D / P, etc.

Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.

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