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Audited Supplier MAGNETRON SPUTTERING: OVERVIEW
Sputtering is a plasma based deposition process in which energetic ions are accelerated towards a target. The ions strike the target and atoms are ejected (or sputtered) from the surface. These atoms travel towards the substrate and incorporate into the growing film.
Lab desk small magnetron sputtering coater with water cooling target
Dual-target magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company.
1-inch, 2-inch, 3-inch magnetron target is optional.
The device is equipped with two 500W DC power supply. The DC power supply can be used for the preparation of metal film. The two targets can meet the needs of multi-layer or multiple coatings.
The coating machine is equipped with two-channel high-precision mass flowmeter. If you have other requirements, you can customize the gas path of up to four-channel mass flowmeters to meet the complex gas environment construction requirements.
The instrument is equipped with advanced turbo-molecular pump, the ultimate vacuum is 1.0E-5Pa, and other types of molecular pump is available .
Molecular pump gas path is controlled by multiple solenoid valves, you can open the chamber to take out the sample without shutting down the pump.
This product can be equipped with an integrated industrial computer to control the system. In the computer program.
Specifications of magnetron target sputter coater
| Sample stage | Size | 100mm | Heating | ≤500ºC |
| Rotation speed | 1-20r/min | Temp control | ±1ºC | |
| Magnetron sputter head | Quantity | 2" x2 | Cooling mode | Water cooled |
| Vacuum chamber | Size | Dia 210mm× 260mm | Watch window | φ40mm |
| Material | SUS | Open mode | Front opening | |
| Sputter power supply | DC power supply | 1 set | Output power | ≤300W |
| Output voltage | ≤600V | response time | <5ms | |
| Water cooling | Tank capacity | 9L | Flow | 10 L/min |
| Film thickness gauge | Accuracy | 0.1angstrom | Cooling mode | Water cooling |
| Other | Power supply | AC220V,50Hz | Total power | 4kw |
| Molecular pump system | Backing pump | Rotary vane pump | Pumping | 1.1L/s |
| Secondary pump | turbo molecular pump(domestic) | Pumping | 600L/s | |
| Extraction interface | KF40 | Air outlet | KF16 |
1. WE have magnetron sputtering coater with 1 target, 2 targets, 3 targets, target can be designed at the top or bottom of
the chamber.
2. DC or RF target is available.
3. Different target material is optional
4. Strong magnetic target and Pernanent magenetic target is optional
5. Magnetron sputtering coater with evaporation source is available
6. Customized service is always available!
Lab Dual target magnetron sputtering coater
Dual target sputtering coater with 2 DC power
Dual target magnetron sputtering coater with reciprocating sample stage
Dual target magnetron sputtering coater with bottom target
Dual target sputtering coater with thermal evaporation source
WE can ship the magnetron sputter coater by land, by sea, by air, by express, also can arrange package and shipment according to your requirements.
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
IS MAGNETRON SPUTTERING THE RIGHT PROCESS FOR YOUR WORK?
Please get in touch and we can collaborate on your project.
How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.
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