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Sputtering is a plasma based deposition process in which energetic ions are accelerated towards a target. The ions strike the target and atoms are ejected (or sputtered) from the surface. These atoms travel towards the substrate and incorporate into the growing film.
Magnetron sputtering coating equipment is a special laboratory coating instrument developed by our company. The equipment can be equipped with DC power supply and RF power supply. The power ranges from 500W to 1000W. It can be used to prepare single or multilayer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, etc.
Compared with the conventional plasma sputtering, magnetron sputtering has the advantages of high energy, high speed, high deposition rate and low sample temperature rise. The magnetron target is equipped with water-cooled interlayer. The water cooler can effectively take away heat and avoid heat accumulation on the target surface, so that the magnetron coating can work stably for a long time.
| Power supply | AC220V,50Hz | |
| Whole power | 6KW | |
| Limit Vacuum Degree | 5x10-4Pa | |
| Sample table parameters | Size | φ150mm |
| Heat temp | 500ºC max. | |
| Temp control | ±1ºC | |
| Rotation speed | 1-20rpm adjustable | |
| Magnetron sputtering head parameters | Quantity:1/2/3 | Size:2" |
| Cooling mode | Water cooled,flow 10L/min required | |
| Water chiller | 10L/min Circulating water cooling | |
| Vacuum chamber | Size | φ300mm X 340mm H |
| Material | SUS | |
| Watch window | φ100mm | |
| Opening mode | open type, easy to replace target | |
| Gas flow controller | One-channel,200sccm Ar; | |
| Vacuum pump | A molecular pump system,pumping 600L/S | |
| Quartz vibrating film thickness gauge | One set, resolution 0.10 angstrom | |
| Sputter power source | DC power supply:500W-1000W,Suitable for preparing metal films RF power supply500W-1000W,Suitable for non - metallic films |
|
| Operating mode | All-in-one computer operation | |
| Overall Dimensions | 1090mm X 900mm X 1250mm | |
| Total weight | 350kg | |
1. WE have magnetron sputtering coater with 1 target, 2 targets, 3 targets, target can be designed at the top or bottom of
the chamber.
2. DC power or RF power target is available.
3. Different target material is optional
4. Strong magnetic target and Pernanent magenetic target is optional
5. Magnetron sputtering coater with evaporation source is available
6. Customized service is always available!
Single target magnetron sputtering coater with DC powerSingle target magnetron sputtering coater with RF power
Desk bottom single target magnetron sputtering coater
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, having our own design team and factory with mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Made in China Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact us.
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