150W RF Power Pecvd System with 360 Rotating Function

• After-sales Service: on-Line Service
• Warranty: One Year
• Application: Industry, School, Lab
• Customized: Customized
• Certification: CE
• Structure: Portable
• Model NO.: TN-PECVD-R
• Material: Stainless Steel
• Type: Tubular Furnace
• Product Name: Pecvd System
• Tube Material: High Purity Quartz
• Temperature: 1200c
• Heating Zone: 200mm*1
• Furnace Tube Size: 50*450mm
• RF Power: 150W
• RF Frequency: 13.56MHz
• Transport Package: Fumigated Wooden Box
• Trademark: TN
• Origin: China
• HS Code: 8401200000
• Production Capacity: 20 Sets Per Month

Product Description

Product Description

150W RF power PECVD system with 360 rotating function

Single heating zone rotary PECVD, equipped with vacuum automatic feeder, and KF40 interface reserved at the end of the furnace tube can be connected to the receiving tank. The feeder adopts screw feeding, the powder can be fed into the furnace tube at a rated rate, and the feeding rate can be changed by adjusting the rotary speed. It can realize the continuous coating and modification of powder materials by PECVD method under the atmosphere protection environment. The receiving tank can collect the processed powder under the atmosphere protection environment.

The equipment is equipped with 100W RF power at 13.56MHz. It can generate plasma in vacuum. High-energy plasma can activate the sample surface, effectively enhance the reaction effect and increase the reaction rate. This auxiliary method is widely used in scientific experiments such as graphene preparation and particle coating.

This equipment is especially suitable for granular sample experiments. Through mechanical transmission, it can control the continuous rotation of the working tube 360° with adjustable rotation speed, so that the materials in the tube are continuously stirred and mixed, and fully contact with the gas and plasma, so that the reaction of the sample is more uniform and stable.

Product Parameters

Specifications of PECVD system
 

RF power supply	Output Power	150W
	Output accuracy	±1%
	RF frequency	13.56MHz
	RF stability	±0.005%
	Cooling method	Air-cooling
1200ºC Single heating zone tube furnace	Supply voltage	AC220V,50Hz
	Maximum power	2KW
	Heating zone	Single heating zone 200mm
	Working temperature	Maximum 1200 ºC, continuous operating temperature should be ≤1100 ºC
	Temperature accuracy	± 1 ºC
	Temperature control method	AI-PID 30-stage process curve, can store multiple Three temperature zone independent control, with overheat and thermocouple failure protection
	Furnace tube material	High purity quartz
	Furnace tube size	Dia. 50x800mm
	Sealing method	Vacuum stainless steel flange, KF16 flange
	Adjustable speed	0-20rpm
	slope	0-15°
	Vacuum pump	Rotary vane mechanical pump
	Ultimate vacuum	1.0E-1Pa
	Feeding method	Vacuum funnel and screw feed

 

Detailed Photos

1. WE have CVD/PECVD machine with gas supply system+vacuum system+tube furnace + plasma generator.

2. Tube furnace (temperature) :1200C, 1400C, 1600C, customized temperature is avaliable.

3. Tube furnace (heating zone) :single zone, dual zone, triple zone, customized No. of heating zone is avaliable.

4. Tube Material: quartz, corundum, alloy, and other material of tube is customizable.

5. Tube with different diameter and length is customizable.

6. Plasma generator: 100W, 150W, 300W, 500W, 1000W, and other power of plasma generator is customizable.

7. Flowmeter: 1~3 or multi channel flow meter is optional based on your process.

CVD-- tube furnace with 1200C single heating zone 

CVD / PECVD-- tube furnace with 1200C triple heating zone 

PECVD-- roll- to- roll
PECVD-- rotary type
 

Other machines:

Company Profile

Packaging & Shipping

We can ship the CVD, PECVD machine by sea, by air, by land and by Express, also we can arrange shipment according to your requirements.

FAQ

Q. Are you manufacturer or trading company?
A. We are professional manufacturer of  laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service. 

Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.

Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.

Q. How to pay?
A. T T, L / C, D / P, etc.

Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.

Contact Us

SHALL WE DISCUSS YOUR PROJECT?

Please get in touch and we can collaborate to get you the answers and solutions you need.
How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.