Suppliers with verified business licenses
Audited Supplier Three-source high vacuum evaporation coater
Three Evaporation Source High Vacuum Coater is a high-vacuum coater with three evaporation sources. The equipment adopts a front door type vacuum chamber design, which has a large chamber space and strong expandability, which can meet the evaporation coating of multi-style and large-size samples.
The chamber is equipped with an upper sample stage, and the clamping or clamping sample mounting parts can be selected according to the user's sample style.
The sample stage is rotatable, heated, and all operations are integrated through the touchscreen. The vacuum pump group of the equipment is a two-stage vacuum system, which consists of a bipolar rotary vane vacuum pump and a turbo molecular pump, which can provide a clean and oil-free high vacuum environment for vacuum coating experiments; the vacuum system contains a complete pneumatic valve system, users can One-button operation through the touch screen realizes operations such as vacuum extraction, non-stop sampling, and complete shutdown.
There are three groups of evaporation sources in this equipment, which are tungsten boat evaporation sources and water-cooled copper electrodes, which can support a maximum current of 260A, and the heating temperature can reach up to 1800ºC. It can realize the evaporation of various refractory metals. The three groups are independent Thermal evaporation source, will not cause mutual contamination of plating materials. The equipment adopts an integrated design, the cavity and the electric control part are separated left and right, which realizes the separation of water and electricity, and effectively ensures the safety of users. The electronic control part adopts the design of the combination of touch screen and button panel. Auxiliary functions such as vacuum system and sample stage are operated by one button on the touch screen, and power-on evaporation and film thickness control are operated independently through the panel, which is as convenient as possible for users at the same time. Avoid the possibility of misuse. The equipment has perfect design and excellent performance, and is a must-have for high-precision evaporation coating experiments in laboratories.
Metal and Dielectric Films
Manufacture of thin film sensors
Optical element
Nano and Microelectronics
Solar battery
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Three Evaporation Source High Vacuum Coater |
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Sample stage |
Size |
Maximum support φ150mm sample |
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Function |
Rotatable, heating up to 500°C |
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Evaporation source |
Quantity |
Tungsten boat x3 |
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Power |
Each evaporation source is equipped with an independent power supply; three evaporation sources have a total of three independent power supplies |
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Vacuum chamber |
Cavity size |
φ300x400mm |
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Observation window |
Front φ100mm |
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Cavity material |
304 stainless steel |
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Open method |
Front door |
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Film thickness control (optional) |
Crystal-type film thickness measuring instrument, optional multi-channel film thickness controller |
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Vacuum system |
Foreline pump |
Bipolar Rotary Vane Pump |
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Exhaust port |
KF16 |
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Secondary pump |
Turbomolecular pump |
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Exhaust port |
CF160 |
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Vacuum measurement |
Resistance + Ionization Composite vacuum gauge |
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Exhaust rate |
Mechanical pump 1.1L/s Molecular pump 600L/s |
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Ultimate vacuum |
1.0E-5Pa |
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Power supply |
AC 220V 50/60Hz |
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Pumping rate |
Rotary vane pump: 1.1L/S |
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Control System |
PLC automatic control Operation interface: touch screen + operation panel (touch screen controls deposition process and fast data entry; user friendly PLC software system, can be updated via network) |
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Other |
Supply voltage |
AC380V,50Hz |
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Overall size |
1000mm X 800mm X 1500mm |
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Total power |
5kW |
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Total Weight |
350kg |
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Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have our own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact us.
Suppliers with verified business licenses
Audited Supplier 
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