High Temperature 1200c Lab Pecvd Tube Furnace with Gas System

• Application: Industry, School, Lab
• Customized: Customized
• Certification: CE
• Structure: Portable
• Material: Stainless Steel
• Type: Tubular Furnace
• Model NO.: TN-1200X-III-50IC
• Product Name: CVD Tuber Furnace
• Tube Material: High Purity Quartz
• Temperature: 1200c
• Heating Zone: 200mm*1
• Furnace Tube Size: 50*450mm
• Temperature Accuracy: ±1ºC
• Transport Package: Fumigated Wooden Box
• Trademark: TN
• Origin: China
• HS Code: 8401200000
• Production Capacity: 20 Sets Per Month

Product Description

Product Description

 High Temperature 1200c Lab PECVD tube Furnace with gas system

1. This CVD system is specially designed for graphene production, using a 1200ºC mini tube furnace, equipped with a high-
    precision mass flow meter and a thin-film vacuum gauge.

2. Compared with the conventional Pirani resistance gauge, the reading of the thin film gauge is accurate and not affected by the
    type of gas, which is very suitable for the vacuum coating process.

3. The CVD tube furnace is equipped with a combustible gas detection device, which is linked with a solenoid valve at the air
    outlet. Once there is a leakage, the solenoid valve can be closed to ensure safety.

4. The CVD tube furnace comes with footprint and is very suitable for laboratory preparation of CVD.

Product Parameters

Specifications of PECVD

RF   power supply	Signal   frequency	13.56MHz±0.005%
	Power   output range	0~300W
	Maximum   reflected power	100W
	Reflected   power (at maximum power)	<3W
	Power   stability	±0.1%
Tube furnace	Tube   material	High   purity quartz
	Outer   diameter of tube	100mm
	Tube   length	1200mm
	Furnace   chamber length	440mm
	Heating   zone length	200mm+200mm   (two temperature zone)
	Constant   temperature zone length	200mm
	Continuous   working temperature	Max.1100ºC
	Temperature   control accuracy	±1ºC
	Temperature   control mode	30   segment program temperature control
	Display   mode	LCD
	Sealing   method	304   stainless steel vacuum flange
Gas   supply system	Model	CY-6Z
	Channel   numbers	6
	Measuring   unit	Mass   flow controller
	Measuring   range	A   channel: 0~200SCCM   for H2	Remarks:   If other ranges are required, please specify when ordering. According to the   customer's specific requirements, the flow meter of corresponding gas type   and range is optional.
		B   channel: 0~200SCCM   for CH4
		C   channel: 0~200SCCM   for C2H4
		C   channel: 0~500SCCM   for N2
		D   channel: 0~500SCCM   for NH3
		E   channel: 0~500SCCM   for Ar
	Measurement accuracy	±1.5%F.S
	Working   pressure difference	-0.15Mpa~0.15Mpa
	Connecting   pipe	304   stainless steel
	Gas   channel	304   stainless steel needle valve
	Interface   specification	1/4"   ferrule connector for gas inlet and outlet
Vacuum   system	Mechanical   pump	Double-stage   rotary vane pump
	Pumping   rate	1.1L/S
	Vacuum   measurement	Resistance   gauge
	Ultimate   vacuum	1.0E-1Pa
	Pumping   interface	KF16
Sliding   rail		Can   achieve the sliding of two temperature zone furnace, to realize rapid temperature   rise and fall.
Power   supply		AC220V   50Hz

 

 

Detailed Photos

1. WE have CVD/PECVD machine with gas supply system+vacuum system+tube furnace + plasma generator.

2. Tube furnace (temperature) :1200C, 1400C, 1600C, customized temperature is avaliable.

3. Tube furnace (heating zone) :single zone, dual zone, triple zone, customized No. of heating zone is avaliable.

4. Tube Material: quartz, corundum, alloy, and other material of tube is customizable.

5. Tube with different diameter and length is customizable.

6. Plasma generator: 100W, 150W, 300W, 500W, 1000W, and other power of plasma generator is customizable.

7. Flowmeter: 1~3 or multi channel flow meter is optional based on your process.

CVD-- tube furnace with 1200C single heating zone 

CVD / PECVD-- tube furnace with 1200C triple heating zone 

PECVD-- roll- to- roll
PECVD-- rotary type

Disulfide MOS2 CVD System

DCCVD system
HPCVD system

Company Profile

Packaging & Shipping

We can ship the CVD, PECVD machine by sea, by air, by land and by Express, also we can arrange shipment according to your requirements.

FAQ

Q. Are you manufacturer or trading company?
A. We are professional manufacturer of  laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service. 

Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.

Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.

Q. How to pay?
A. T T, L / C, D / P, etc.

Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.

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