• Triple Source PVD Vacuum Thermal Evaporation Coating Machine for Wafer Film Deposition
  • Triple Source PVD Vacuum Thermal Evaporation Coating Machine for Wafer Film Deposition
  • Triple Source PVD Vacuum Thermal Evaporation Coating Machine for Wafer Film Deposition
  • Triple Source PVD Vacuum Thermal Evaporation Coating Machine for Wafer Film Deposition
  • Triple Source PVD Vacuum Thermal Evaporation Coating Machine for Wafer Film Deposition
  • Triple Source PVD Vacuum Thermal Evaporation Coating Machine for Wafer Film Deposition

Triple Source PVD Vacuum Thermal Evaporation Coating Machine for Wafer Film Deposition

After-sales Service: on-Line Service
Warranty: One Year
Type: Thermal Evaporation Coater
Coating: Vacuum Coating
Substrate: Steel
Certification: CE
Gold Member Since 2023

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Henan, China
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  • Overview
  • Product Description
  • Product Parameters
  • Detailed Photos
  • Company Profile
  • FAQ
  • Contact Us
Overview

Basic Info.

Model NO.
TN-EVH300-III-HHH-SS
Condition
New
Product Name
Thermal Evaporation Coating Machine
Evaporation Source
Boat or Basket
Source Material
Tungsten
Evaporation Current
300A
Sample Table Size
150mm
Volatge
3 Phase380V, 50Hz
Ultimate Vacuum
1.0e-5PA
Chamber Material
SUS304
Chamber Size
300*400mm
Backing Pump
1.1L/S
Molecular Pump
600L/S
Transport Package
Fumigated Wooden Box
Specification
1000*800*1500mm
Trademark
TN
Origin
China
HS Code
8543300090
Production Capacity
10 Set Per Month

Product Description

Triple Source PVD Vacuum Thermal Evaporation Coating Machine for Wafer Film Deposition
 
Product Description

OVERVIEW--THERMAL EVAPORATION

Thermal evaporation is a popular physical vapor deposition technique because of its simplicity. During this process, a material in a high-vacuum environment is heated to its evaporation point by joule heating of the resistive boat in which it is located. The vaporized molecules then travel from the source to the substrate where they nucleate together, forming a thin film coating. A wide variety of materials can be deposited using this technique such as aluminum, silver, nickel, chrome, magnesium, among many others.

Features of thermal evaporation coating machine:

There are three groups of evaporation sources in this equipment, which are tungsten boat evaporation sources and water-cooled copper electrodes, which can support a maximum current of 260A, and the heating temperature can reach up to 1800ºC. It can realize the evaporation of various refractory metals.
The three groups are independent Thermal evaporation source, will not cause mutual contamination of plating materials. The equipment adopts an integrated design, the cavity and the electric control part are separated left and right, which realizes the separation of water and electricity, and effectively ensures the safety of users.
The electronic control part adopts the design of the combination of touch screen and button panel. Auxiliary functions such as vacuum system and sample stage are operated by one button on the touch screen, and power-on evaporation and film thickness control are operated independently through the panel, which is as convenient as possible for users at the same time. Avoid the possibility of misuse.
he equipment has perfect design and excellent performance, and is a must-have for high-precision evaporation coating experiments in laboratories.


 
Product Parameters

Specifications of thermal evaporation coater:

Vacuum Thermal Evaporation Coater
Sample Stage Size φ150mm
Heating Max. 500C
Rotary 0~20rpm, adjustable
Evaporation source Tungsten boat/Basket*3
Power Each evaporation source is equipped with an independent power supply, evaporation at the same time is available
Vacuum chamber Cavity size φ300x400mm
Observation window Front φ100mm
Cavity material SS304
Opening Front door opening
Film thickness control Quartz crystal film thickness monitor, Frequence 0.10 Å
Vacuum system Backup pump Rotary Vane Pump, 1.1L/s
Exhaust port KF16
Secondary pump Molecular pump, 600L/s
Exhaust port CF160
Vacuum measurement Composite vacuum gauge
Ultimate vacuum 5.0E-4Pa
Control System PLC+ touch screen

Other
Supply voltage AC380V,50Hz
Overall size 1000mm X 800mm X 1500mm
Total power 7kW
Total Weight 350kg
 
Detailed Photos

1. We have thermal evaporation coater with 1/2/3/4/8... evaporation sources, can evaporation metal and organic material
2. Chamber material: High purity quartz--- low vacuum, SS304 chamber-- high vacuum
3. Film thickness monitor is optional
4. Thermal evaporation, E-beam, magnetron sputtering in one machine is available
5. Different material of evaporation source is available
6. Customize thermal evaporation coater according to your process is available

Triple Source PVD Vacuum Thermal Evaporation Coating Machine for Wafer Film DepositionTriple Source PVD Vacuum Thermal Evaporation Coating Machine for Wafer Film DepositionTriple Source PVD Vacuum Thermal Evaporation Coating Machine for Wafer Film Deposition

Triple Source PVD Vacuum Thermal Evaporation Coating Machine for Wafer Film Deposition

 
Company Profile

Zhengzhou Tainuo Film Materials Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.

Our company's main products are: spin coater, thermal evaporation coater, magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.

Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, Brazil, etc. and have established long-term cooperative relationships with local dealers.

If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!

Triple Source PVD Vacuum Thermal Evaporation Coating Machine for Wafer Film Deposition

 

FAQ

Q. Are you manufacturer or trading company?
A. We are professional manufacturer of  laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service. 

Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.

Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.

Q. How to pay?
A. T T, L / C, D / P, etc.

Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.

Contact Us

WE WANT TO HEAR ABOUT YOUR PROCESS! 

Please get in touch and we can collaborate on your project. When we work together, amazing things can happen. Your brilliant ideas with our innovative team will create the tool that will bring your research or production to the next level. We're looking forward to hearing from you.

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Gold Member Since 2023

Suppliers with verified business licenses

Manufacturer/Factory
Main Products
Evaporation Coater; Film Coater
Number of Employees
13