Triple Source Vacuum PVD Thermal Evaporation Coater with Tungsten Boat for 150mm Specimens

• After-sales Service: on-Line Service
• Warranty: One Year
• Type: Thermal Evaporation Coater
• Coating: Vacuum Coating
• Substrate: Steel
• Certification: CE
• Model NO.: TN-1800X-TE3-SS
• Condition: New
• Product Name: Vacuum Evaporation Coater
• Evaporation Source: Boat or Basket
• Source Material: Tungstate
• Evaporation Current: 300A
• Sample Table Size: 150mm
• Volatge: 3 Phase380V, 50Hz
• Ultimate Vacuum: 1.0e-5PA
• Chamber Material: SUS304
• Chamber Size: 300*400mm
• Backing Pump: Dual Stage Rotary Vane Pump
• Secondary Pump: Turbo Molecular Pump
• Transport Package: Fumigated Wooden Box
• Specification: 1000*800*1500mm
• Trademark: TN
• Origin: China
• HS Code: 8543300090
• Production Capacity: 10 Set Per Month

Product Description

 

Product Description

OVERVIEW--THERMAL EVAPORATION

Thermal evaporation is a popular physical vapor deposition technique because of its simplicity. During this process, a material in a high-vacuum environment is heated to its evaporation point by joule heating of the resistive boat in which it is located. The vaporized molecules then travel from the source to the substrate where they nucleate together, forming a thin film coating. A wide variety of materials can be deposited using this technique such as aluminum, silver, nickel, chrome, magnesium, among many others.

Triple source vacuum PVD thermal evaporation coater with tungsten boat for 150mm specimens

There are three groups of evaporation sources in this equipment, which are tungsten boat evaporation sources and water-cooled copper electrodes, which can support a maximum current of 260A, and the heating temperature can reach up to 1800ºC. It can realize the evaporation of various refractory metals.
The three groups are independent Thermal evaporation source, will not cause mutual contamination of plating materials. The equipment adopts an integrated design, the cavity and the electric control part are separated left and right, which realizes the separation of water and electricity, and effectively ensures the safety of users.
The electronic control part adopts the design of the combination of touch screen and button panel. Auxiliary functions such as vacuum system and sample stage are operated by one button on the touch screen, and power-on evaporation and film thickness control are operated independently through the panel, which is as convenient as possible for users at the same time. Avoid the possibility of misuse.
he equipment has perfect design and excellent performance, and is a must-have for high-precision evaporation coating experiments in laboratories.

 

Product Parameters

Specifications of thermal evaporation coater
 

Triple source vacuum thermal evaporation coater with tungsten boat for 150mm specimens
Sample stage	Size	Maximum support φ150mm sample
	Function	Rotatable, heating up to 500°C
Evaporation source	Quantity	Tungsten boat x3
Power	Each evaporation source is equipped with an independent power supply; three evaporation sources have a total of three independent power supplies
Vacuum chamber	Cavity size	φ300x400mm
	Observation window	Front φ100mm
	Cavity material	304 stainless steel
	Open method	Front door
Film thickness control (optional)	Crystal-type film thickness measuring instrument, optional multi-channel film thickness controller
Vacuum system	Foreline pump	Bipolar Rotary Vane Pump
	Exhaust port	KF16
	Secondary pump	Turbomolecular pump
	Exhaust port	CF160
	Vacuum measurement	Resistance + Ionization Composite vacuum gauge
	Exhaust rate	Mechanical pump 1.1L/s Molecular pump 600L/s
	Ultimate vacuum	1.0E-5Pa
	Power supply	AC 220V 50/60Hz
	Pumping rate	Rotary vane pump: 1.1L/S
Control System	PLC automatic control Operation interface: touch screen + operation panel (touch screen controls deposition process and fast data entry; user friendly PLC software system, can be updated via network)
Other	Supply voltage	AC380V,50Hz
	Overall size	1000mm X 800mm X 1500mm
	Total power	5kW
	Total Weight	350kg

Detailed Photos

Company Profile

FAQ

Q. Are you manufacturer or trading company?
A. We are professional manufacturer of  laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service. 

Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.

Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.

Q. How to pay?
A. T T, L / C, D / P, etc.

Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.

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