| After-sales Service: | on-Line Service |
|---|---|
| Warranty: | One Year |
| Type: | Magnetron Sputtering |
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Deaktop Dual DC Magnetron Sputtering Coater with Crystal Film Thickness Monitor
MAGNETRON SPUTTERING: OVERVIEW
Sputtering is a plasma based deposition process in which energetic ions are accelerated towards a target. The ions strike the target and atoms are ejected (or sputtered) from the surface. These atoms travel towards the substrate and incorporate into the growing film.
Features of magnetron sputtering coater:
1. Dual-target DC magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment and It is standardized,
modular and customizable. The two targets can meet the needs of multi-layer or multiple coatings.
2. There are 1-inch, 2-inch and 3-inch, magnetron target to optional. You can choose the target depends on the size of the
substrate. The coater is equipped with two 500W DC power. and it's used for the preparation of conductive materials.
3. The coating machine is equipped with two-channel high-precision mass flowmeter. Four-channel mass flowmeter is available.
4. The vacuum system is turbo-molecular pump, the ultimate vacuum is up to 1.0E-5Pa, Customized pump is available.
5.The gas path of molecular pump is controlled by multiple solenoid valves, you can open the chamber to take out the sample without shutting down the pump.
6. Integrated computer to control is available. all the functions can be relaized by the computer
Specifications of magnetron sputtering coater:
|
Product Name |
Magnetron Sputtering Coater |
|
|
Model |
TN-MSP300S-2DC | |
|
Sample Stage |
Size |
φ100mm |
|
Heating Temperature |
<500ºC |
|
|
Rotary Speed |
0~20rpm, adjustable |
|
|
Sputtering Gun |
2 inch*1, 50.8mm, thickness<3mm |
|
|
Vacuum Chamber |
Size |
φ245*300mm |
|
Observation Window |
Quartz |
|
|
Chamber Material |
SUS304 |
|
|
Opening |
Top-open |
|
|
Vacuum System |
Backup Pump |
Rotary vane vacuum pump, 1.1L/s |
|
Secondary Pump |
Molecular Pump, 60L/S |
|
|
Vacuum Measurement |
Composite vacuum gauge,Range:10-5~105Pa |
|
|
Sucking Port |
KF16, KF40 |
|
|
Exhaust Port |
KF16 |
|
|
Vacuum Degree |
1.0×10-4Pa |
|
|
Voltage |
AC 220V 50/60Hz |
|
|
Sputtering Power |
Quantity |
DC Power Supply*2 |
|
Output power |
DC-500W |
|
|
Others |
Voltage |
AC220V,50Hz |
|
Total Power |
3kW |
|
|
Overall Size |
600*600*700mm |
|
1. WE have magnetron sputtering coater with 1 target, 2 targets, 3 targets, 4 tagrst, etc. Target can be designed at the top or bottom of the chamber.
2. 0-1000W DC power or RF power target is available. Bias function is optional. Ion Source is also available.
3. Target size: 1-inch, 2-inch, 3-inch, 4-inch, etc.
4. Strong magnetic target and Pernanent magenetic target is optional.
5. Magnetron sputtering coater with evaporation, E-beam is available.
6. Customized service is always available!
WE can ship the magnetron sputtering coater by land, by sea, by air, by express, also can arrange package and shipment according to your requirements.
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
IS MAGNETRON SPUTTERING THE RIGHT PROCESS FOR YOUR WORK?
Please get in touch and we can collaborate on your project.
How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.
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