| Application Fields: | Electronic |
|---|---|
| Certification: | CE |
| Condition: | New |
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500W 13.56MHz RF Plasma Generator for Pecvd Tube Furnace
RF Power Supply for Plasma Cleaner
The TN-RFG series RF power supply adopts the current stable and reliable power amplifier and the company's core DC control system, so that the product has very stable performance and high product reliability. Adopt Chinese and English display interface, easy to operate. Mainly used in photovoltaic industry, flat panel display industry, semiconductor industry, chemical industry, laboratory, scientific research, manufacturing, etc.
Features of RF power supply generator
1. Rack installation
2. Adopt full digital control, with convenient and rich operation menu
3. The incoming line has APFC module, which improves the power factor of the input side and reduces the harmonics
4. Stable and reliable power amplifier and DC control module
5. The rated power can still be output when the standing wave is 1.5
6. With a variety of optional communication interfaces, through the communication interface, the power supply can be completely
operated
7. Bright LCD display, intuitive operation
8. With CEX phase synchronization function
9. Triple programmable analog outputs
10. Perfect protection function
Specifications of RF power supply generator
| Input | Input voltage: AC220V±10% 3ΦAC380V±5%(Special specifications can be customized) |
| Input frequency: 47~63Hz | |
| Output | Output frequency: 2MHz,13.56MHz,27.12MHz,40.68MHz |
| Output power: 0.5~5kW | |
| Regulation range of output power: 1~100% | |
| Output impedance: 50Ω+j0 | |
| Output interface: type N | |
| Output mode: continuous, pulse | |
| Pulse frequency: 0.1~10kHz | |
| Duty cycle: 10~90% | |
| Performance index | Power factor: 0.98 |
| Frequency stability accuracy: ±0.005% | |
| Efficiency: 75% (at rated output) | |
| Harmonic: <-45dBc | |
| Stray: <-50dBc | |
| External control interface: analog quantity, communication and synchronization | |
| Communication mode: Standard RS485 communication interface; Optional Ether CAT, industrial Ethernet, etc. |
We can ship the plasma RF generator by sea, by air, by land, by Express, also can arrange the shipment according to your requirements.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, having our own design team and factory with mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Made in China Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact us.
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