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Audited Supplier MAGNETRON SPUTTERING: OVERVIEW
Sputtering is a plasma based deposition process in which energetic ions are accelerated towards a target. The ions strike the target and atoms are ejected (or sputtered) from the surface. These atoms travel towards the substrate and incorporate into the growing film.
Magnetron sputtering coating equipment is a special laboratory coating instrument developed by our company. The equipment can be equipped with DC power supply and RF power supply. The power ranges from 500W to 1000W. It can be used to prepare single or multilayer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, etc.
Single target magnetron sputter coating with film thicness monitor
Compared with the conventional plasma sputtering, magnetron sputtering has the advantages of high energy, high speed, high deposition rate and low sample temperature rise. The magnetron target is equipped with water-cooled interlayer. The water cooler can effectively take away heat and avoid heat accumulation on the target surface, so that the magnetron coating can work stably for a long time.
Specifications of magnetron sputter coating
| Power supply | AC220V,50Hz | |
| Whole power | 6KW | |
| Limit Vacuum Degree | 5x10-4Pa | |
| Sample table parameters | Size | φ150mm |
| Heat temp | 500ºC max. | |
| Temp control | ±1ºC | |
| Rotation speed | 1-20rpm adjustable | |
| Magnetron sputtering head parameters | Quantity:1/2/3 | Size:2" |
| Cooling mode | Water cooled,flow 10L/min required | |
| Water chiller | 10L/min Circulating water cooling | |
| Vacuum chamber | Size | φ300mm X 340mm H |
| Material | SUS | |
| Watch window | φ100mm | |
| Opening mode | open type, easy to replace target | |
| Gas flow controller | One-channel,200sccm Ar; | |
| Vacuum pump | A molecular pump system,pumping 600L/S | |
| Quartz vibrating film thickness gauge | One set, resolution 0.10 angstrom | |
| Sputter power source | DC power supply:500W-1000W,Suitable for preparing metal films RF power supply500W-1000W,Suitable for non - metallic films |
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| Operating mode | All-in-one computer operation | |
| Overall Dimensions | 1090mm X 900mm X 1250mm | |
| Total weight | 350kg | |
1. WE have magnetron sputtering coater with 1 target, 2 targets, 3 targets, target can be designed at the top or bottom of
the chamber.
2. 0-1000W DC power or RF power target is available.
4. Strong magnetic target and Pernanent magenetic target is optional
5. Magnetron sputtering coater with evaporation, e-beam is available
6. Customized service is always available!
WE can ship the magnetron sputter coating by land, by sea, by air, by express, also can arrange package and shipment according to your requirements.
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
IS MAGNETRON SPUTTERING THE RIGHT PROCESS FOR YOUR WORK?
Please get in touch and we can collaborate on your project.
How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.
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