| After-sales Service: | on-Line Service |
|---|---|
| Warranty: | One Year |
| Type: | Magnetron Sputtering |
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Lab Used Single Target Magnetron Sputtering Coater Vacuum Deposition System for SEM Research
MAGNETRON SPUTTERING: OVERVIEW
Sputtering is a plasma based deposition process in which energetic ions are accelerated towards a target. The ions strike the target and atoms are ejected (or sputtered) from the surface. These atoms travel towards the substrate and incorporate into the growing film.
Magnetron sputtering coating equipment is a special laboratory coating instrument developed by our company. The equipment can be equipped with DC power supply and RF power supply. The power ranges from 500W to 1000W. It can be used to prepare single or multilayer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, etc.
Specifications of magnetron sputtering coater:
| Product Name | Magnetron Sputter Coater | ||
| Sample stage | Size | Dia.150mm | |
| Heating temperature | Max. 500ºC | ||
| Temperature accuracy | ±1ºC | ||
| Rotational speed | 1-20rpm adjustable | ||
| Magnetron Sputtering Target | Quantity | 2"*1 (1",2", 3",4"optional) | |
| Cooling mode | Water cooling | ||
| Water chiller | Circulating water chiller with flow rate of 10L/min | ||
| Vacuum chamber | Chamber size | Dia.325*500mm | |
| Chamber material | Stainless steel | ||
| Watch window | Dia.100mm | ||
| Opening mode | Front door open | ||
| Mass Flow Meter | 2 channels; measuring range 100SCCM; 100SCCM (can be customized according to customer needs) | ||
| Vacuum system | Model | CY-GZK103-A | |
| Molecular pump | 600L/s | ||
| Backing pump | 1.1L/s | ||
| Ultimate vacuum | 1.0E-5Pa | ||
| Pumping interface | CF160 | ||
| Exhaust interface | KF40 | ||
| Vacuum measurement | Compound vacuum gauge | ||
| Power supply | AC;220V, 50/60Hz | ||
| Pumping rate | vacuum up to 1.0E-3Pa in 20 minutes | ||
| Power configuration | Quantity | RF power supply x1 | |
| Max output power | RF 300W | ||
| Film Thickness | Quartz crystal film thickness monitor, Resolution: 0.1 Å | ||
| Other parameters | Supply voltage | AC220V,50Hz | |
| Total power | 4KW | ||
| Overall size | 600mm×650mm×1280mm | ||
| Total Weight | About 350kg | ||
1. WE have magnetron sputtering coater with 1 target, 2 targets, 3 targets, 4 tagrst, etc. Target can be designed at the top or bottom of the chamber.
2. 0-1000W DC power or RF power target is available. Bias function is optional.
3. Target size: 1-inch, 2-inch, 3-inch, 4-inch, etc.
4. Strong magnetic target and Pernanent magenetic target is optional.
5. Magnetron sputtering coater with evaporation, E-beam is available.
6. Customized service is always available!
1. WE have magnetron sputtering coater with 1 target, 2 targets, 3 targets, 4 targets, etc. Target can be designed at the top or bottom of the chamber.
2. 0-1000W DC power or RF power target is available. Bias function is optional.
3. Target size: 1-inch, 2-inch, 3-inch, 4-inch, etc.
4. Strong magnetic target and Permanent magnetic target is optional.
5. Magnetron sputtering coater with evaporation, E-beam is available.
6. Customized service is always available!
WE can ship the magnetron sputtering coater by land, by sea, by air, by express, also can arrange package and shipment according to your requirements.
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
IS MAGNETRON SPUTTERING THE RIGHT PROCESS FOR YOUR WORK?
Please get in touch and we can collaborate on your project.
How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.
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