| After-sales Service: | 12 Months |
|---|---|
| Warranty: | 12 Months |
| Type: | Coating Production Line |
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Three target magnetron sputtering coater is a cost-effective coating equipment independently developed by our company; it has standardization, modularization and customization. Three 3-inch magnetron sputtering target, one is high intensity magnetic target, two are permanent target; the power supply is two 500W DC power supply and one 300W RF power supply, the DC power supply can be used in the preparation of metal film, and the RF power supply can be used in the preparation of non-metal film, three target can meet the needs of multi-layer or multiple coating.
The coating equipment is equipped with two high-precision mass flow meters. If the customers has additional requirement, the gas path of up to four can be customized to meet the requirements of complex gas environment construction. The instrument is equipped with advanced turbo-molecular pumps, the ultimate vacuum can up to 1.0E-5Pa, while other types of molecular pump are available for purchase. The gas path of molecular pump is controlled by multiple solenoid valves, which can open the chamber to take out samples without turning off the pump, and can greatly improving your work efficiency. The product can be equipped with integrated industrial control computer to control the system, the most of function like the control to vacuum pump group and sputtering power supply can be realized in the computer program, it can further improve your experiment efficiency.
Three target magnetron coater application range:
The equipment can be used in the preparation of single or multilayer ferroelectric film, conductive film, alloy film, semiconductor film, ceramic film, dielectric film, optical film, oxide film, hard film, PTFE film and so on. Compared with similar equipment, the three target magnetron coater is not only widely used but also has the advantages of small volume and easy operation. It is an ideal equipment for preparing material film in the laboratory.
| Sample stage | Size | Dia.140mm |
| Heating temperature | Max 500ºC | |
| Temperature accuracy | ±1ºC | |
| Rotational speed | 1-20rpm adjustable | |
| Magnetron Sputtering head | Quantity | 2"×3 (1",2" optional) |
| Cooling mode | Water cooling | |
| Water chiller | Circulating water chiller with flow rate of 10L/min | |
| Vacuum chamber | Chamber size | Dia.300mm×300mm |
| Chamber material | Stainless steel | |
| Watch window | Dia.100mm | |
| Opening mode | Top cover open | |
| Mass flowmeter | 2 channels; measuring range 100SCCM; 100SCCM (can be customized according to customer needs) | |
| Vacuum system | Model | CY-GZK103-A |
| Molecular pump | CY-600 | |
| Backing pump | Rotary vane pump | |
| Ultimate vacuum | 1.0E-5Pa | |
| Pumping interface | CF160 | |
| Exhaust interface | KF40 | |
| Vacuum measurement | Compound vacuum gauge | |
| Power supply | AC;220V 50/60Hz | |
| Pumping rate | Molecular pump: 600L/S rotary vane pump: 1.1L/S Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20 minutes |
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| Power configuration | Quantity | DC power supply x2 RF power supply x1 |
| Max output power | DC 500 W, RF 500W | |
| Other parameters | Supply voltage | AC220V,50Hz |
| Total power | 4KW | |
| Overall size | 600mm×650mm×1280mm | |
| Total Weight | About 300kg | |
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have our own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact us.
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