After-sales Service: | on-Line Service |
---|---|
Warranty: | 1 Year |
Type: | Spin Coating |
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Heating Spin Coater with Ultrasonic, Atmosphere for Semiconductor Silicon Wafer
WHAT IS SPIN COATINGA:
Specifications of spin coater
Name | ultrasonic assisted atmosphere spin coater |
Substrate size | 6inches |
Rotation speed | 100~10000rpm adjustable |
Rotational acceleration | 100~5000rpm/s adjustable |
Longest spinning time(a single time) | 3000s |
chamber size | Φ200mm* 90mm |
Voltage | 220V 50Hz |
Power | 400W |
Heating Temp | 0-100ºC |
Warranty | 1 year, life-long technical support, excluding vulnerable parts |
Atomizing head Material | Titanium alloy |
Frequency | 40kHz |
Power | 130W |
Flow | 0.55mL/s |
Particle diameter | 25um |
Atomizing head type | Cone type |
Atomizing head weight | 0.3kg |
Ultrasonic power supply | Size:315*312*135mm,weight:5kg |
Flow range | 0.001uL/min-43.349mL/min |
Power down memory function | Save the setting parameters, no need to set them after power on again |
Injector | 10uL-1000uL |
Syringe | 1mL-60mL |
Linear speed range | 5um/min-65um/min |
Linear speed adjustment resolution | 5um/min |
Maximum stroke | 140mm |
Travel resolution | 0.156um |
Rated linear thrust | >90N |
Control gas type | 2 |
Gas flow rate | 16-160mL/min |
We have spin coater 4-inch 8-inch 12-inch
Vacuum chucks: 10mm, 25mm, 55mm, 100mm, customized vacuum chuck is available
Chamber material of spin coater: Stainless Steel, Acrylic, PP, PTFE
Optional function: Auto injection system, Glove box, Atmosphere purity, Heating, etc
We can ship the spin coater by sea, by land, by express, by air, also can arrange shipment arrording to your requirements
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.