| After-sales Service: | on-Line Service |
|---|---|
| Warranty: | One Year |
| Application: | Industry, School, Lab |
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Rotary CVD Tube Furnace for Lithium-Ion Battery Material
Specifications of PECVD tube furnace
| RF power supply | Output Power | 150W |
| Output accuracy | ±1% | |
| RF frequency | 13.56MHz | |
| RF stability | ±0.005% | |
| Cooling method | Air-cooling | |
| 1200ºC Single heating zone tube furnace | Supply voltage | AC220V,50Hz |
| Maximum power | 2KW | |
| Heating zone | Single heating zone 200mm | |
| Working temperature | Maximum 1200 ºC, continuous operating temperature should be ≤1100 ºC | |
| Temperature accuracy | ± 1 ºC | |
| Temperature control method | AI-PID 30-stage process curve, can store multiple Three temperature zone independent control, with overheat and thermocouple failure protection |
|
| Furnace tube material | High purity quartz | |
| Furnace tube size | Dia. 50x800mm | |
| Sealing method | Vacuum stainless steel flange, KF16 flange | |
| Adjustable speed | 0-20rpm | |
| slope | 0-15° | |
| Vacuum pump | Rotary vane mechanical pump | |
| Ultimate vacuum | 1.0E-1Pa | |
| Feeding method | Vacuum funnel and screw feed |
1. WE have CVD/PECVD machine with gas supply system+vacuum system+tube furnace + plasma generator.
2. Tube furnace (temperature) :1200C, 1400C, 1600C, customized temperature is avaliable.
3. Tube furnace (heating zone) :single zone, dual zone, triple zone, customized No. of heating zone is avaliable.
4. Tube Material: quartz, corundum, alloy, and other material of tube is customizable.
5. Tube with different diameter and length is customizable.
6. Plasma generator: 100W, 150W, 300W, 500W, 1000W, and other power of plasma generator is customizable.
7. Flowmeter: 1~3 or multi channel flow meter is optional based on your process.
Zhengzhou Tainuo Film Materials Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.
Our company's main products are: spin coater, thermal evaporation coater, magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.
Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, Brazil, etc. and have established long-term cooperative relationships with local dealers.
If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!
We can ship the CVD, PECVD machine by sea, by air, by land and by Express, also we can arrange shipment according to your requirements.
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
SHALL WE DISCUSS YOUR PROJECT?
Please get in touch and we can collaborate to get you the answers and solutions you need.
How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.
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