Suppliers with verified business licenses
Audited Supplier MAGNETRON SPUTTERING: OVERVIEW
Sputtering is a plasma based deposition process in which energetic ions are accelerated towards a target. The ions strike the target and atoms are ejected (or sputtered) from the surface. These atoms travel towards the substrate and incorporate into the growing film.
Magnetron sputtering coating equipment is a special laboratory coating instrument developed by our company. The equipment can be equipped with DC power supply and RF power supply. The power ranges from 500W to 1000W. It can be used to prepare single or multilayer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, etc.
Single Target Magnetron Sputtering Coater for Conductive Material
Compared with the conventional plasma sputtering, magnetron sputtering has the advantages of high energy, high speed, high deposition rate and low sample temperature rise. The magnetron target is equipped with water-cooled interlayer. The water cooler can effectively take away heat and avoid heat accumulation on the target surface, so that the magnetron coating can work stably for a long time.
Specifications of single magnetron target sputtering coater
| Product Name | Desktop single-target magnetron sputtering coater with stainless steel cavity |
| Product Model | TN-MSP190S-1T-A |
| Installation Condition | 1,Working environment temperature: 25ºC±15ºC,humidity: 55%Rh±10%Rh; 2,Equipment power supply:AC220V,50Hz, must be well grounded; 3,Rated power:1000w; 4,Equipment for gas:The equipment chamber should be filled with argon gas for cleaning. The customer should prepare argon gas with purity ≥99.99%. 5,Table size requirements: 600mm×600mm×700mm,bearing capacity ≥ 50kg; 6,The position should be well ventilated and cooled. |
| Technical Indicators |
|
| Notice | 1, Magnetron sputtering has a high working vacuum, generally within 2Pa, and needs to be used with molecular pump. 2, In order to achieve a high oxygen free environment, the vacuum chamber should be cleaned at least 3 times with high purity inert gas. 3, Magnetron sputtering is sensitive to the air intake, so mass flow meter is needed to control the air intake |
| Optional accessory | |
| Film thickness Monitor |
1, Film thickness resolution:0.0136Å(aluminum) 2, Accuracy of film thickness :±0.5%,it depends on process conditions, especially sensor position, material stress, temperature and density 3, Measuring speed:100ms-1s/times,measurement range can be set :500000Å(aluminum) 4, Standard sensor crystal:6MHz 5, Suitable for wafer frequency:6MHz 6. suitable for wafer size:Φ14mm 7. mounting flange:CF35 |
| Another Accessory | 1,CY-CZK103 series high performance molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~105Pa)CY-GZK60 series small molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~102Pa) VRD-4 bipolar rotary vane vacuum pump 2,KF25 Vacuum bellows; The length can be 0.5m, 1m or 1.5m. KF40 clamp bracket 3,Film thickness meter crystal oscillator; |
1. WE have magnetron sputtering coater with 1 target, 2 targets, 3 targets, target can be designed at the top or bottom of
the chamber.
2. DC power or RF power target is available.
3. Different target material is optional
4. Strong magnetic target and Pernanent magenetic target is optional
5. Magnetron sputtering coater with evaporation source is available
6. Customized service is always available!
Single target magnetron sputtering coater with DC power
Desk single target magnetron sputtering coater
Single target magnetron sputtering coater with RF power
WE can ship the magnetron sputter coater by land, by sea, by air, by express, also can arrange package and shipment according to your requirements.
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
IS MAGNETRON SPUTTERING THE RIGHT PROCESS FOR YOUR WORK?
Please get in touch and we can collaborate on your project.
How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.
Suppliers with verified business licenses
Audited Supplier 
){kind=link}
){kind=link}