Heating Spinning Coater with Ultrasonic Atmosphere for Semiconductor Silicon Wafer

• After-sales Service: 12 Months
• Warranty: 12 Months
• Type: Coating Production Line
• Coating: Vacuum Coating
• Substrate: Steel
• Certification: CE
• Model NO.: spin coater
• Condition: New
• Chamber Material: PTFE
• Upper Cover: PVC
• Sample Stage: Gold-Plated Copper Plate, with Good Thermal Conduc
• Operating Temperature: 0-100
• Operation Mode: 7 Inch HD LCD Touch Screen
• Material: Liquid or Colloidal
• Rotation Speed: 100~10000rpm Adjustable
• Substrate Size: 6inches
• Rotational Acceleration: 100~5000rpm/S Adjustable
• Transport Package: Fumigated Wooden Box
• Specification: 800x680x1700mm
• Trademark: TN
• Origin: China
• HS Code: 8486209000
• Production Capacity: 200/Month

Product Description

Heating Spin Coater with Ultrasonic Atmosphere
for Semiconductor Silicon Wafer
 

Product Description

Ultrasonic atmosphere heating spin coater is a small and flexible spin coater, which can spray the glue on the substrate through the ultrasonic nozzle, and then evenly apply the glue on the substrate through high-speed rotation. It is also possible to directly perform the spin coating operation alone.

• The chamber is equipped with heating elements, which can be baked after spinning coating
• The product has a gas path controlled by a 2-way float flowmeter, which can pass inert gas into the chamber to protect the glue liquid from the gas in the air when spinning coating
• This machine is suitable for surface coating of semiconductor wafer, slide, wafer, substrate, ITO conductive glass and other processes and plate making.
• The maximum size of the crystallizable wafer is 6 inches, the rotational speed can reach 10000rpm, and the acceleration can reach 5000rpm;
• It has the advantages of stable speed, quick start, convenient operation, etc., and can ensure the consistency and uniformity of the thickness of spinning coating.

Functions and features of Ultrasonic atmosphere heating spin coater:
1. Adopt DC brushless motor, single chip microcomputer control
2. High-definition touch screen control
3. Single step and multi-step spinning coating operation can be carried out, five programs can be stored, and each program can be set with five steps of operation
4. Anti-blocking glue design
5. Aluminum alloy chamber, durable
6. It has various auxiliary functions such as ultrasonic, atmosphere, heating and so on, which can be used for spinning coating research

 

Product Parameters

 

Technical parameter of Ultrasonic atmosphere heating spin coater:

Name	ultrasonic assisted atmosphere spin coater
Substrate size	6inches
Rotation speed	100~10000rpm adjustable
Rotational acceleration	100~5000rpm/s adjustable
Longest spinning time(a single time)	3000s
chamber size	Φ200mm* 90mm
Voltage	220V 50Hz
Power	400W
Heating Temp	0-100ºC
Warranty	1 year, life-long technical support, excluding vulnerable parts

Ultrasonic system

Atomizing head Material	Titanium alloy
Frequency	40kHz
Power	130W
Flow	0.55mL/s
Particle diameter	25um
Atomizing head type	Cone type
Atomizing head weight	0.3kg
Ultrasonic power supply	Size:315*312*135mm,weight:5kg

Syringe pump

Flow range	0.001uL/min-43.349mL/min
Power down memory function	Save the setting parameters, no need to set them after power on again
Injector	10uL-1000uL
Syringe	1mL-60mL
Linear speed range	5um/min-65um/min
Linear speed adjustment resolution	5um/min
Maximum stroke	140mm
Travel resolution	0.156um
Rated linear thrust	>90N

Flowmeter

Control gas type	2
Gas flow rate	16-160mL/min

 

Detailed Photos

 

Detailed pictures of Ultrasonic atmosphere heating spin coater:

 

Company Profile

 

 

FAQ

 

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, having our own design team and factory with mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Made in China Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact us.