After-sales Service: | on-Line Service |
---|---|
Warranty: | 1 Year |
Type: | Spin Coating |
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Lab Purifying Spin Coater with Vacuum Pump and Heating Table for Semiconductor Silicon Wafer
WHAT IS SPIN COATINGA:
Product Name | Purify spin coater with heating table | |
Spin coater | Supply voltage | AC220V, 60Hz |
Spin speed | 0~9999rpm, adjustable | |
Acceleration | 100~5000rpm/s | |
Speed resolution | 1rpm | |
Time resolution | 1s | |
Single step time | 3000s | |
Substrate size | Diameter ≤ 4 inches (100mm) | |
Chamber material | Acrylic | |
Operation method | Button + LCD screen | |
Dispensing method | Manual dispensing, optional precision syringe pump | |
Coating curve | 5 segments per curve, a total of 5 curves can be stored | |
Pumping port | Φ6mm quick screw joint | |
Vacuum Chuck | O.D 10mm, 25mm, 55mm | |
Overall size | 210mm×250mm×180mm | |
Heating Table | Heating panel size | 150*150mm, square |
Temperature range | RT~300C | |
Temperature resolution | 0.1C | |
Precision | ±1C | |
Temperature uniformity | <±2C | |
Power input | AC220V,50/60Hz | |
Purify chamber | Chamber size | 800*680*1700mm |
Inner Layout | 4-inch spin coater at the left, heating table at the right side | |
Air purification grade | 100 grade, USA standard | |
Light | Inner Led | |
Exhaust system | Vacuum pump | Dry mechanical pump |
Pumping rate | 50L/min | |
Power supply | AC220V, 60Hz |
We have spin coater 4-inch 8-inch 12-inch
Vacuum chucks: 10mm, 25mm, 55mm, 100mm, customized vacuum chuck is available
Chamber material of spin coater: Stainless Steel, Acrylic, PP, PTFE
Optional function: Auto injection system, Glove box, Atmosphere purity, Heating, etc
Zhengzhou Tainuo Film Materials Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.
Our company's main products are: spin coater, thermal evaporation coater, magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.
Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, Brazil, etc. and have established long-term cooperative relationships with local dealers.
If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!
We can ship the plasma cleaner by sea, by air, by express, also can arrange shipment according to your requirements.
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.