| After-sales Service: | on-Line Service |
|---|---|
| Warranty: | One Year |
| Application: | Industry, School, Lab |
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lab PECVD system with 13.56Mhz frequency for silicon silicon nitride silicon dioxide thin film
Plasma -enhanced chemical vapor deposition (PECVD) is a type of chemical vapor deposition characterized by the use of plasma activation at low temperatures to enhance the chemical vapor deposition reaction. The advantages of this method are that the deposition temperature is low, the deposition rate is fast, and the film produced has excellent electrical properties, good substrate adhesion and excellent step coverage.
Specifications of PECVD system
| Model number | TN-PECVD-500T-SS | |
| Cavity size | Phi 500 - | |
| Warm zone length | 200 | |
| Rf power supply | 500W- | |
| Temperature | 1000 ºC | |
| Pump for forestage | Molecular pump set | |
| Display type | T | |
| Warm zone | I | |
| Water cooler | CW5200 | |
| Cavity material | SS | |
| Sample heating Heating temperature |
Above RT-1000ºC, temperature control accuracy: ±1.C, using temperature control meter for temperature control; Adjustable speed: 1-20rpm adjustable |
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| Spray head size | Φ90mm, the electrode spacing between the spray head and the sample 40-100mm online continuous adjustable (can be adjusted according to the process), and with a ruler index display | |
| Sample Table | 200mm diameter | |
| Working vacuum for deposition | 0.133-133Pa (can be adjusted according to process) | |
| Top flange | It can be lifted by motor, the substrate is easy to change, and there is a visual port | |
| Substrate Table | Linear and azimuth motion of the substrate table, substrate heating and temperature control, mounting table and touch screen control, substrate linear motion is manually controlled, and substrate rotation is controlled by DC motors | |
| Vacuum chamber | Front door opening type, φ500mm X 500mm stainless steel | |
| Observation window | φ100mm with baffle | |
| Mass flowmeter | Six way mass flow meter | |
| Number paths of gas | Six paths | |
| Pressure range | 0.15 Mpa to 0.15 Mpa | |
| Range | 0 to 100 SCCM (oxygen) 0 to 100 SCCM (CF4) 0 to 200 SCCM (SF6) 0 to 200 SCCM (argon) 0 to 500 SCCM (other gases air) 0-500 SCCM (other gases nitrogen) |
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| Flow control range | Plus or minus 1.5% | |
| Gas path material | 304 stainless steel | |
| Pipe joint | 6.35mm bushing joint | |
| Vacuum system | Front pump: oil-free vacuum pump 4.7L/S Molecular pump: 1200L/S |
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| Measuring range | 1 x 10-5 to 1 x 105Pa | |
| Measurement accuracy | 1 x 10-5 ~ 1 x 10-4Pa±40% reading 1 x 10-4 ~ 1 x 105Pa for a reading of ±20% |
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1. WE have CVD/PECVD machine with gas supply system+vacuum system+tube furnace + plasma generator.
2. Tube furnace (temperature) :1200C, 1400C, 1600C, customized temperature is avaliable.
3. Tube furnace (heating zone) :single zone, dual zone, triple zone, customized No. of heating zone is avaliable.
4. Tube Material: quartz, corundum, alloy, and other material of tube is customizable.
5. Tube with different diameter and length is customizable.
6. Plasma generator: 100W, 150W, 300W, 500W, 1000W, and other power of plasma generator is customizable.
7. Flowmeter: 1~3 or multi channel flow meter is optional based on your process.
Zhengzhou Tainuo Film Materials Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.
Our company's main products are: spin coater, thermal evaporation coater, magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.
Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, Brazil, etc. and have established long-term cooperative relationships with local dealers.
If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!
We can ship the CVD, PECVD machine by sea, by air, by land and by Express, also we can arrange shipment according to your requirements.
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
SHALL WE DISCUSS YOUR PROJECT?
Please get in touch and we can collaborate to get you the answers and solutions you need.
How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.
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