Multi-Source High Vacuum Evaporation Coating Equipment Coater with Tungsten Boat for Semiconductor Films

Product Details
After-sales Service: 12 Months
Warranty: 12 Months
Type: Coating Production Line
Gold Member Since 2023

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  • Multi-Source High Vacuum Evaporation Coating Equipment Coater with Tungsten Boat for Semiconductor Films
  • Multi-Source High Vacuum Evaporation Coating Equipment Coater with Tungsten Boat for Semiconductor Films
  • Multi-Source High Vacuum Evaporation Coating Equipment Coater with Tungsten Boat for Semiconductor Films
  • Multi-Source High Vacuum Evaporation Coating Equipment Coater with Tungsten Boat for Semiconductor Films
  • Multi-Source High Vacuum Evaporation Coating Equipment Coater with Tungsten Boat for Semiconductor Films
  • Multi-Source High Vacuum Evaporation Coating Equipment Coater with Tungsten Boat for Semiconductor Films
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  • Overview
  • Product Description
  • Product Parameters
  • Detailed Photos
Overview

Basic Info.

Model NO.
TN-EVH500-VIII-HO-SS
Coating
Vacuum Coating
Substrate
Steel
Certification
CE
Condition
New
Product Name
Vacuum Evaporation Coater
Evaporation Source
Tungstate Boat or Basket
Evaporation Current
300A
Sample Table Size
150mm
Volatge
3 Phase380V, 50Hz
Ultimate Vacuum
1.0e-5PA
Chamber Material
SUS304
Weight
500kg
Machine Power
5kw
Transport Package
Fumigated Wooden Box
Specification
1200mm*900mm*1500mm
Trademark
TN
Origin
China
HS Code
8486209000
Production Capacity
200/Month

Product Description

 
Multi-source high vacuum Evaporation Coating Equipment coater with Tungsten Boat for semiconductor films
 
Product Description

The evaporation source of the equipment is two groups, taking tungsten boat evaporation source, water-cooled  copper  electrode,  can  support  the  maximum  300A  large  current, heating temperature up to 1800ºC, can achieve a variety of refractory metal evaporation. The equipment adopts  the  integrated  design,  the  cavity  and  the  electric  control  part  are separated  from  each other,  which  realizes  the  separation  of  water  and  electricity,  and effectively ensures the safety of users. The electronic control part uses the combination of touch screen and button panel design, vacuum system, sample table and other auxiliary functions through the touch screen  one -click operation,  electrification  evaporation,  film thickness control through the panel independent operation, as convenient as possible to the user while  avoiding  the  possibility  of  misoperation. The  device  has  perfect  design  and superior performance, and is an essential choice for high-precision evaporation coating test in the laboratory.

Product Parameters

Multi-source high vacuum evaporation   coating instrument

Sample Table

Measurements

φ150mm sample

Height

150mm adjustable up and down

Evaporation source

Quantity

Tungsten Boat x2

 

Vacuum chamber

Cavity size

Phi 350 x600mm

Viewing window

Front    φ100mm with blackout

Cavity material

304 stainless steel

Opening method

Front door opening type

Film thickness

control

Crystal vibration type film thickness   measuring instrument, optional multi-channel film thickness controller

Vacuum System

Forepump

Bipolar rotary vane pump

Air extraction

connector

KF16

Secondary pump

Turbo molecular pump

Pumping interface

ISO160

Vacuum

measurement

Resistance + ionization composite vacuum   gauge

Exhaust rate

Mechanical pump 1.1L/s Molecular pump   600L/s

Ultimate vacuum

1.0 e-5 Pa

Power supply

AC 220V 50/60Hz

Pumping rate

Rotary vane pump: 1.1L/S

Flowmeter

Optional one mass flowmeter 500sccm Ar   gas

Control system

PLC automatic control operation   interface: touch screen + operation panel

Other

Supply voltage

AC220V,50Hz

Overall dimensions

1200mm X 900mm X 1500mm

Machine weight

500kg

Machine power

5kW

 
Detailed Photos

Multi-Source High Vacuum Evaporation Coating Equipment Coater with Tungsten Boat for Semiconductor FilmsMulti-Source High Vacuum Evaporation Coating Equipment Coater with Tungsten Boat for Semiconductor FilmsMulti-Source High Vacuum Evaporation Coating Equipment Coater with Tungsten Boat for Semiconductor Films

 
Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have our own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Made-in-China Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact us.

Multi-Source High Vacuum Evaporation Coating Equipment Coater with Tungsten Boat for Semiconductor FilmsMulti-Source High Vacuum Evaporation Coating Equipment Coater with Tungsten Boat for Semiconductor FilmsMulti-Source High Vacuum Evaporation Coating Equipment Coater with Tungsten Boat for Semiconductor FilmsMulti-Source High Vacuum Evaporation Coating Equipment Coater with Tungsten Boat for Semiconductor FilmsMulti-Source High Vacuum Evaporation Coating Equipment Coater with Tungsten Boat for Semiconductor FilmsMulti-Source High Vacuum Evaporation Coating Equipment Coater with Tungsten Boat for Semiconductor FilmsMulti-Source High Vacuum Evaporation Coating Equipment Coater with Tungsten Boat for Semiconductor Films
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