| After-sales Service: | 12 Months |
|---|---|
| Warranty: | 12 Months |
| Type: | Coating Production Line |
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Single-target RF magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. It has the characteristics of miniaturization and standardization. The magnetron target head has 1 inch 2 inches and 3 inches to choose from. Customers can choose the target according to the size of the substrate to be plated. The device is equipped with 300W RF power supply, which can be used for sputtering of non-metal film and optical film. According to the experimental requirements, other specifications of DC or RF power supply can be selected to realize the coating operation of various materials.
The coating machine is equipped with two-channel high-precision mass flowmeter. If you have other requirements, you can customize the gas path of up to four-channel mass flowmeters to meet the complex gas environment construction requirements. The instrument is equipped with advanced turbomolecular pump sets, the ultimate vacuum is up to 1.0E-5Pa, and other types of molecular pumps are available for purchase. Molecular pump gas path is controlled by multiple solenoid valves, you can open the chamber to take out the sample without shutting down the pump, greatly improving your work efficiency. This product can be equipped with an integrated industrial computer to control the system. In the computer program, most functions such as vacuum pump control and sputtering power control can be realized, which can further improve your experimental efficiency.
Single-target RF magnetron sputtering coater application:
The device can be used to prepare single-layer ceramic films, dielectric films, optical films, oxide films, hard films, PTFE films, and the like. Compared with similar equipment, the single-target magnetron sputtering coater is not only widely used, but also has the advantages of small size and easy operation. It is an ideal equipment for laboratory preparation of material films, especially suitable for research on solid electrolyte and OLED in the laboratory.
Technical parameter
| Sample stage | Size | φ185mm | Temperature control accuracy | ±1ºC |
| Heating temperature | Max 500ºC | Rotate speed | 1-20rpm adjustable | |
| Magnetron Sputtering target head | Quantity | 2"×1 (1",2",3"optional) | Water chiller | Circulating water chiller with flow rate of 10L/min |
| Cooling mode | Water cooling | |||
| Vacuum chamber | Chamber size | φ300mm×300mm | Watch window | φ100mm |
| Chamber material | Stainless steel | Opening mode | Top cover removable | |
| Mass flow meter | 2 channels; measuring range 100sccm; 100sccm (can be customized according to customer needs) | |||
| Vacuum system | Model | CY-GZK103-A | Pumping interface | KF40 |
| Molecular pump | CY-600 | Exhaust interface | KF16 | |
| Backing pump | rotary vane pump | Vacuum measurement | Compound vacuum gauge | |
| Ultimate vacuum | 1.0E-5Pa | Power supply | AC;220V 50/60Hz | |
| Pumping rate | Molecular pump: 600L/S rotary vane pump: 1.1L/S Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20 minutes | |||
| Power configuration | Quantity | RF power supply ×1 | Max output power | 300W |
| Other parameters | Supply voltage | AC220V,50Hz | Overall size | 600mm×650mm×1280mm |
| Total power | 2KW | Total Weight | 300kg | |
Notes:
1. We have magnetron sputtering coater with 1 target, 2 targets, 3 targets, target can be designed at the top or bottom of the chamber.
2. DC power or RF power target is available.
3. Different target material is optional
4. Strong magnetic target and Permanent magnetic target is optional
5. Magnetron sputtering coater with evaporation source is available
6. Customized service is always available.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have our own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Made-in-China Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact us.
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