Lab 10L 100W 150W Plasma Cleaner Cleaning Machine for Silicon Wafer Cleaning

• After-sales Service: 12 Months
• Warranty: 12 Months
• Application: Cleaning Machine
• Model NO.: TN-PC13.56M-10L-100Q
• Cleaning Media: Plasma Cleaning
• Automation: Automatic
• Cleaning Precision: Ultra-Precision Industrial Cleaning
• Control: PLC
• Principle: Physical Cleaning
• Certification: CE
• Condition: New
• Customized: Customized
• Feature: High Efficiency
• Chamber Material: High Purity Quartz
• Chamber Size: φ230mm*350mm
• RF Power: 0-100W/150W Continuously Adjustable
• Frequency: 13.56MHz
• Gas Channel: 2
• Vacuum Pump: Rotary Vane Vacuum Pump
• Total Power: 550W/600W
• Total Weight: 90kg
• Transport Package: Wooden Box
• Specification: 670mm*670mm*600mm
• Trademark: TN
• Origin: Henan China
• HS Code: 8486209000
• Production Capacity: 200/Month

Product Description

 

 

Lab 10L 100W 150W Plasma Cleaner Cleaning Machine  for Silicon Wafer Cleaning                    

Product Description

Introduction of plasma cleaner:

Plasma cleaning machine is a small, non - destructive cleaning equipment. The plasma cleaning machine uses low pressure excited plasma as cleaning medium, which effectively avoids the secondary pollution caused by liquid cleaning medium to the cleaned objects. The instrument is equipped with a mechanical vacuum pump, which can maintain the vacuum of the chamber while also removing the pollutants after the plasma reaction through the vacuum pump. Therefore, a short time of cleaning can make the organic pollutants be completely cleaned out.
plasma cleaner (plasma cleaner), is a new high-tech technology, the use of plasma to achieve conventional cleaning methods can not achieve the effect. Plasma is a state of matter, also known as the fourth state of matter, and does not belong to the common solid-liquid-gas triplet. Enough energy is applied to a gas to dissociate it into a plasma state.
 
In addition to the cleaning function, this small plasma cleaning machine can also change the surface performance of some materials according to the need under specific conditions. In the cleaning process, the glow discharge of the small plasma cleaning machine can strengthen the adhesion, compatibility and infiltration of these materials.
This plasma cleaning machine is suitable for laboratory and small production. The 13.56Mhz RF power supply can be used to match the plasma of various commonly used gases. Rf power supply power from 100W to 1000W between a variety of common specifications available for selection, to meet the diverse needs of users.

Applications of plasma cleaner:

Metal: remove oil, greasy dirt and other organic matter and oxide layer on the metal surface;

Automotive manufacturing: used for pre-treatment of plastics and paint spraying in automotive manufacturing processes;

Textile production: used for the hydrophilicity, hydrophobicity and surface modification of textiles, filter screens and films;

Biomedicine: Petri dishes enhance activity, vascular stents, syringes, catheters and pro-wetting of various materials, before cross-coating treatment;

Aerospace: surface coating pretreatment of insulating materials, electronic components, etc.;

Electronics: circuit board cleaning and etching. Non-oxidation and activation treatment of PP and other materials, to improve solderability;

Semiconductor industry: wafer processing and processing to remove photoresist, pre-package pretreatment;

LED: Pre-treatment before the bracket is cleaned and packaged;

Plastic rubber: Improve the surface activity of PS, PE, PTFE, TPE, POM, AS and PP, making it easy to bond and print.

Product Parameters

 

Main parts	Item	Parameters
Cleaning chamber	Chamber material	High purity quartz
	Chamber size	Diameter 180 mm; Length 300 mm
RF power supply	Power supply features	The power supply is an all-solid-state RF power supply, and adopts a high-stability and high-reliability power amplifier module and a DC module, which effectively ensures the RF power output of the power supply. High quality electronic components are used to ensure the reliability of the products.
	Power advantage	Long time normal operation  Simple and flexible operation  High power supply efficiency and low heat generation  With perfect reflection power protection function
	RF power	0~100W/150W continuously adjustable
	Signal frequency	13.56MHz ±0.005%
	Reflected power	≤200W
	Power stability	±0.1%
	RF connector	N type connector
	Machine efficiency	≥75%
	Harmonic component	≤-50 dBc
	cooling method	Forced air cooling
Gas measurement	Measuring unit	Float flowmeter
	Gas channel	Two channels
	A channel range	10~100ml
	B channel range	16~160ml
Vacuum	Vacuum measurement	Digital vacuum gauge (resistance gauge)
	Vacuum pump	Two-stage rotary vane vacuum pump
	Motor speed	50 Hz: 1440; 60 Hz: 1720
	Pumping rate	50 Hz: 1.1L/s; 60 Hz: 1.3L/s
	Vacuum range	0.1Pa~10000Pa
	Ultimate vacuum	0.5Pa
	Motor noise	≤56dB
	Pipe interface	Gas inlet: KF16; exhaust port KF16.
	Connecting pipe	KF16 vacuum bellows
	Vacuum valve	Solenoid valve
	Motor Power	400W
Other	Power supply	AC220V 50/60Hz
	Total power	550W/600W
	Operating temperature	-10ºC- 40ºC
	Working vacuum	≤40Pa
	Overall size	670mm*670mm*600mm
	Total Weight	90kg (including packaging)

Detailed Photos

Notes: 
The following specifications can be provided,
Volume: 1L, 2L, 5L, 10L, etc
RF power supply: 100W, 150W, 300W, 300W, 1000W, adjustable. 13.56MHz
Dual-channel gas float flowmeter
Vacuum: Dual-stage rotary vane vacuum pump, 0.5Pa
Customzied plasma cleaner according to your requirements is available

Company Profile

Packaging & Shipping

We can ship the plasma cleaner by sea, by air, by express, also can arrange shipment according to your requirements.

FAQ

Q. Are you manufacturer or trading company?
A. We are professional manufacturer of  laboratory instruments, We have professional R&D team and workshop, which can promise the quality and after-sale service. 

Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.

Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.

Q. How to pay?
A. T T, L / C, D / P, etc.

Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.

MORE QUESTIONS, PLEASE FREELY ASK ME