| After-sales Service: | on-Line Service |
|---|---|
| Warranty: | One Year |
| Type: | Plasma Sputter Coating |
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Lab Triple Target Plasma Sputtering Coater for Thin Film Research
1. This type of small plasma sputtering coating machine adopts single-stage sputtering method, which is widely used for SEM
sample preparation or metal coating experiment.
2. Using low-temperature plasma sputtering process, there is no high temperature during the coating process, thermal damage is
barely happen.
3. This small plasma sputtering coater uses PLC +touch screen control system, easy to operate. a rotatable sample stage is
equipped.
4. This small plasma sputtering instrument uses a PLC +tounch screen control system, easy to learn and operation.
5. It comes with small size, suitable for lab research process.
Specifications of plasma sputter coater:
| Product model | TN-PLZ180-III-DC-Q | |
| Sample stage | Size | 100mm |
| Distance from sample stage to target surface | 20~35mm height adjustable | |
| Rotating speed | 1~20rpm adjustable | |
| Heating temperature | ≤500ºC | |
| Temperature control accuracy | ±1ºC PID temperature control | |
| Plasma sputtering source | Quantity | 2 inchesx1/2/3 |
| Cooling method | Water cooling/Natural cooling | |
| Vacuum chamber | Chamber size | φ180mm x 210mm |
| Observation window | Omnidirectional visibility | |
| Chamber material | High purity quartz | |
| Open method | Top cover removable | |
| Upper and lower cover material | 304 stainless steel | |
| Pumping port | KF16 | |
| Intake port | 1/4 inch ferrule connector | |
| Power configuration | Quantity | DC power supplyx1 |
| Output power | Max. 150W | |
| Sputtering power | 1200V | |
| Max. sputtering current | 50mA | |
| Vacuum system | Vacuum pump type | Dual-stage rotary vane vacuum pump |
| Pumping port | KF16 | |
| Exhaust interface | KF16 | |
| Pumping rate | 1.1L/s(4m3/h) | |
| Ultimate vacuum | ≥0.1Pa | |
| Vacuum measurement | Resistance vacuum gauge | |
| Others | Power supply | AC 220V 50Hz |
| Total power | 1.5kW/2kW | |
| Dimension | 500mm x 320mm x470mm | |
| Weight | 30kg | |
1. We have plasma sputtering coater 1/2/3 targets
2. Substrate rotary, lifting, heating is optional
3. 150W, 300W, 500W DC or RF power supply is optional
Zhengzhou Tainuo Film Materials Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.
Our company's main products are: spin coater, thermal evaporation coater, magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.
Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, Brazil, etc. and have established long-term cooperative relationships with local dealers.
If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!
We can ship the plasma sputter coater by sea, by air, by land, b Express, also can arrange shipment according to your requirement.
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can
promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. TT, L/C, D/P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
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