• Single Dual Three Target Magnetron Sputtering Coating Equipment
  • Single Dual Three Target Magnetron Sputtering Coating Equipment
  • Single Dual Three Target Magnetron Sputtering Coating Equipment
  • Single Dual Three Target Magnetron Sputtering Coating Equipment
  • Single Dual Three Target Magnetron Sputtering Coating Equipment
  • Single Dual Three Target Magnetron Sputtering Coating Equipment

Single Dual Three Target Magnetron Sputtering Coating Equipment

After-sales Service: 12 Months
Warranty: 12 Months
Type: Coating Production Line
Coating: Vacuum Coating
Substrate: Steel
Certification: CE
Gold Member Since 2023

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Henan, China
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  • Overview
  • Product Description
  • Product Parameters
  • Detailed Photos
  • FAQ
Overview

Basic Info.

Model NO.
Magnetron Sputtering coater
Condition
New
Cooling Mode
Water Cooling
Heating Temperature
Max 500ºC
Rotate Speed
1-20rpm Adjustable
Substrate Size
Diameter 185mm
Vacuum Chamber
Stainless Steel
Magnetron Sputtering Target Head
1-3 Magnetron Sputtering Heads
Sample Stage Size
100mm
Rotated Speed
1-20 Rpm (Adjustable)
The Highest Heating Temperature
500ºC
Temperature Control Accuracy
+/- 1.0 °c
Ank Capacity
9L
Vacuum Pump
a Set of Molecular Pump System, Using One-Button O
Cooling System
10L/Min
Transport Package
Fumigated Wooden Box
Specification
550*350*400
Trademark
TN
Origin
China
HS Code
8486209000
Production Capacity
200/Month

Product Description

Single target / dual target / three target magnetron sputtering coating equipment

Product Description

Magnetron sputtering coating equipment is a special laboratory coating instrument developed by our company. The equipment can be equipped with DC power supply and RF power supply. The power ranges from 500W to 1000W. It can be used to prepare single or multilayer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, etc.

Compared with the conventional plasma sputtering, magnetron sputtering has the advantages of high energy, high speed, high deposition rate and low sample temperature rise. The magnetron target is equipped with water-cooled interlayer. The water cooler can effectively take away heat and avoid heat accumulation on the target surface, so that the magnetron coating can work stably for a long time.

After compact design, the balance of volume and performance is realized, the appearance is beautiful and the function is comprehensive. The whole machine is controlled by touch screen and built-in one button coating program, which is easy to operate and is an ideal equipment for preparing thin films in laboratory.

Product Parameters

Technical parameter

Power supply AC220V,50Hz
Whole power 6KW
Limit Vacuum Degree 5x10-4Pa
Sample table parameters Size φ150mm
Heat temp 500ºC max.
Temp control ±1ºC
Rotation speed 1-20rpm adjustable
Magnetron sputtering head parameters Quantity:1/2/3 Size:2"
Cooling mode Water cooled,flow 10L/min required
Water chiller 10L/min Circulating water cooling
Vacuum chamber Size φ300mm X 340mm H
Material SUS
Watch window φ100mm
Opening mode open type, easy to replace target
Gas flow controller One-channel,200sccm Ar;
Vacuum pump A molecular pump system,pumping 600L/S
Quartz vibrating film thickness gauge One set, resolution 0.10 angstrom
Sputter power source DC power supply:500W-1000W,Suitable for preparing metal films
RF power supply500W-1000W,Suitable for non - metallic films
 Operating mode All-in-one computer operation
Overall Dimensions 1090mm X 900mm X 1250mm
Total  weight 350kg

 

Detailed Photos

 

Single Dual Three Target Magnetron Sputtering Coating EquipmentSingle Dual Three Target Magnetron Sputtering Coating EquipmentSingle Dual Three Target Magnetron Sputtering Coating Equipment
 
FAQ


Single Dual Three Target Magnetron Sputtering Coating Equipment
Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have our own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact us.

Single Dual Three Target Magnetron Sputtering Coating EquipmentSingle Dual Three Target Magnetron Sputtering Coating EquipmentSingle Dual Three Target Magnetron Sputtering Coating EquipmentSingle Dual Three Target Magnetron Sputtering Coating EquipmentSingle Dual Three Target Magnetron Sputtering Coating EquipmentSingle Dual Three Target Magnetron Sputtering Coating EquipmentSingle Dual Three Target Magnetron Sputtering Coating Equipment
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