After-sales Service: | 12 Months |
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Warranty: | 12 Months |
Type: | Coating Production Line |
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This equipment is a double target magnetron sputter coating machine, which can be used in the preparation of metal films, in the fields of electronics, optics, special ceramics, etc. it can also be used to prepare SEM samples in laboratory.
It adopts high vacuum stainless steel chamber, front door opening design, and quartz observation window on the door, which is convenient for the observation and recording of the experiment. At the same time, the equipment is equipped with a rotary heating sample table, which can effectively improve the film uniformity and film quality. A set of baffle plate is installed on the top cover, and the two targets can be switched by rotating the baffle plate to realize multilayer coating.
This equipment needs to be used together with high vacuum molecular pump group. Users can choose imported brand small molecular pump to further save installation area.
At the same time, the model can be equipped with film thickness meter components, which can monitor the film thickness in real time and provide reliable parameters for the experimental process.
Dual-target DC magnetron sputtering coater technical parameters:
Sample stage | Size | 100mm | Heating | ≤500ºC |
Rotation speed | 1-20r/min | Temp control | ±1ºC | |
Magnetron sputter head | Quantity | 2" x2 | Cooling mode | Water cooled |
Vacuum chamber | Size | Dia 210mm× 260mm | Watch window | φ40mm |
Material | SUS | Open mode | Front opening | |
Sputter power supply | DC power supply | 1 set | Output power | ≤300W |
Output voltage | ≤600V | response time | <5ms | |
Water cooling | Tank capacity | 9L | Flow | 10 L/min |
Film thickness gauge | Accuracy | 0.1angstrom | Cooling mode | Water cooling |
Other | Power supply | AC220V,50Hz | Total power | 4kw |
Molecular pump system | Backing pump | Rotary vane pump | Pumping | 1.1L/s |
Secondary pump | turbo molecular pump(domestic) | Pumping | 600L/s | |
Extraction interface | KF40 | Air outlet | KF16 |
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have our own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Made-in-China Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact us.