1200c Single-Zone High-Vacuum CVD Furnace with 3-Channel Float Flowmeter

• After-sales Service: 12 Months
• Warranty: 12 Months
• Application: School, Lab
• Model NO.: TN-O1500-60IT
• Customized: Customized
• Certification: CE
• Structure: Desktop
• Material: Stainless Steel
• Type: Tubular Furnace
• Gas Supply System: Gas Flow Flowmeter
• Molecular Pump: 600L/S
• Tube Length: 1000mm
• Heating Zone Length: 300mm
• Vacuum Tube Furnace: Vacuum High-Purity Aluminum Tube
• Measurement Accuracy: +-0.2%
• Rotary Vane Pump: 1.1L/S
• Ultimate Vacuum: 1.0e-5PA
• Operating Temperature: 0-1450c
• Tube Diameter: 60mm
• Transport Package: Standard Export Fumigation Sign Wooden Box Package
• Trademark: TN
• Origin: Henan China
• HS Code: 8486209000
• Production Capacity: 220/Month

Product Description

1200C single-zone high-vacuum CVD furnace with 3-channel float flowmeter

 

Product Description

 

Product description of vacuum CVD furnace

1500ºC single heating zone high vacuum CVD furnace( CY-O1500-60IT-3F-HV) consists of a 1500ºC single temperature zone tube furnace, a three-channel float flowmeter a high vacuum molecular pump set. The gaseous reactant is formed by a legal reaction under certain conditions to form a solid phase product deposited on the surface of the substrate to form a solid film.


The tube furnace is controlled by the precision temperature control instrument for PID temperature control. It can edit the 30-segment lifting temperature program and has the function of overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.

The furnace tube of CVD film equipment is made of high-purity alumina, and the furnace body adopts integrated design. The unique design can ensure the system is stable and safe at 1500ºC. The heating element is made of high-quality silicon carbon rod, which can reach 1500ºC high temperature. If the customer has the need, the silicon molybdenum rod heating element can be customized to achieve a higher temperature of 1700ºC.
The CVD film equipment is equipped with a three-channel float flowmeter, which can mix 1~3 channels of gas to accurately prepare the mixed gas required for the experiment. Another pressure gauge is installed on the front of the float flowmeter to monitor the gas pressure and the mixing tank pressure.

The CVD film equipment is also equipped with a precision molecular pump set, which can achieve a vacuum of 1.0E-3pa level, which can provide users with a purer and more stringent experimental environment than ordinary mechanical pumps.

applications:
CVD furnace is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres. Film preparation from chemical reaction by chemical reaction deposition

 

Product Parameters

 

Technical parameters of vacuum CVD furnace

Vacuum tube   furnace	Model	TN-O1500-60IT
	Tube material	High purity alumina
	Tube diameter	60mm (optional 50mm, 80mm, 100mm)
	Tube length	1000mm
	Furnace chamber   length	400mm
	Heating zone   length	300mm
	Constant   temperature zone	150mm
	Operating   temperature	≤1450ºC
	Temperature  control accuracy	±1ºC
	Temperature   control mode	30 or 50 segment program temperature control
	Display mode	LCD
	Sealing   method	304 stainless steel vacuum flange
	Flange   interface	1/4" ferrule connector, KF16/25/40 joint
	Vacuum	4.4E-3Pa
	Power supply	AC:220V   50/60Hz
Gas supply   system	Model	CY-3F
	Gas channel	3-channel
	Measuring   unit	Gas float flow meter
	Measuring   range	A channel: 0~100ml H2 gas	Remarks: If you need other ranges or gas types, you need to specify when ordering.   According to the customer's specific requirements, the flow meter of the   corresponding gas type and range can be selected.
		B channel: 16~160ml N2 gas
		C channel: 25~250ml Ar gas
	measurement   accuracy	±2.0%
	Pipe   pressure resistance	3MPa
	Working   pressure difference	50~300KPa
	Connecting   pipe	304 tainless steel
	Gas channel	304 stainless steel needle valve
	Interface   specification	1/4" ferrule connector for gas inlet and outlet
Exhaust   system	Model	CY-GZK103-A
	Molecular pump	CY-600
	Backing pump	Rotary vane pump
	Pumping rate	Molecular pump: 600L/S		Comprehensive gas pumping performance: 30 minutes vacuum can reach: 1.0E-3Pa
		Rotary vane pump: 1.1L/S
	Pumping   interface	KF40
	Exhaust   interface	KF16
	Vacuum   measurement	Compound vacuum gauge: Resistance gauge + ionization gauge
	Ultimate   vacuum	1.0E-5Pa
	Power supply	AC:220V   50/60Hz

NOTE:
According to the needs of the experiment, you can choose the temperature, temperature zone, furnace size, vacuum system, flowmeter

 

Detailed Photos

 

Related photos of vacuum CVD furnace

Company Profile

 

FAQ

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Made-in-China Trade Guarantee.

Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact me.