1200C single-zone high-vacuum CVD furnace with 3-channel float flowmeter
Product Description
Product description of vacuum CVD furnace
1500ºC single heating zone high vacuum CVD furnace( CY-O1500-60IT-3F-HV) consists of a 1500ºC single temperature zone tube furnace, a three-channel float flowmeter a high vacuum molecular pump set. The gaseous reactant is formed by a legal reaction under certain conditions to form a solid phase product deposited on the surface of the substrate to form a solid film.
The tube furnace is controlled by the precision temperature control instrument for PID temperature control. It can edit the 30-segment lifting temperature program and has the function of overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.
The furnace tube of CVD film equipment is made of high-purity alumina, and the furnace body adopts integrated design. The unique design can ensure the system is stable and safe at 1500ºC. The heating element is made of high-quality silicon carbon rod, which can reach 1500ºC high temperature. If the customer has the need, the silicon molybdenum rod heating element can be customized to achieve a higher temperature of 1700ºC.
The CVD film equipment is equipped with a three-channel float flowmeter, which can mix 1~3 channels of gas to accurately prepare the mixed gas required for the experiment. Another pressure gauge is installed on the front of the float flowmeter to monitor the gas pressure and the mixing tank pressure.
The CVD film equipment is also equipped with a precision molecular pump set, which can achieve a vacuum of 1.0E-3pa level, which can provide users with a purer and more stringent experimental environment than ordinary mechanical pumps.
applications:
CVD furnace is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres. Film preparation from chemical reaction by chemical reaction deposition
Product Parameters
Technical parameters of vacuum CVD furnace
| Vacuum tube furnace |
Model |
CY-O1500-60IT |
| Tube material |
High purity alumina |
| Tube diameter |
60mm (optional 50mm, 80mm, 100mm) |
| Tube length |
1000mm |
| Furnace chamber length |
400mm |
| Heating zone length |
300mm |
| Constant temperature zone |
150mm |
| Operating temperature |
≤1450ºC |
| Temperature control accuracy |
±1ºC |
| Temperature control mode |
30 or 50 segment program temperature control |
| Display mode |
LCD |
| Sealing method |
304 stainless steel vacuum flange |
| Flange interface |
1/4" ferrule connector, KF16/25/40 joint |
| Vacuum |
4.4E-3Pa |
| Power supply |
AC:220V 50/60Hz |
| Gas supply system |
Model |
CY-3F |
| Gas channel |
3-channel |
| Measuring unit |
Gas float flow meter |
| Measuring range |
A channel: 0~100ml H2 gas |
Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected. |
| B channel: 16~160ml N2 gas |
| C channel: 25~250ml Ar gas |
| measurement accuracy |
±2.0% |
| Pipe pressure resistance |
3MPa |
| Working pressure difference |
50~300KPa |
| Connecting pipe |
304 tainless steel |
| Gas channel |
304 stainless steel needle valve |
| Interface specification |
1/4" ferrule connector for gas inlet and outlet |
| Exhaust system |
Model |
CY-GZK103-A |
| Molecular pump |
CY-600 |
| Backing pump |
Rotary vane pump |
| Pumping rate |
Molecular pump: 600L/S |
Comprehensive gas pumping performance: 30 minutes vacuum can reach: 1.0E-3Pa |
| Rotary vane pump: 1.1L/S |
| Pumping interface |
KF40 |
| Exhaust interface |
KF16 |
| Vacuum measurement |
Compound vacuum gauge: Resistance gauge + ionization gauge |
| Ultimate vacuum |
1.0E-5Pa |
| Power supply |
AC:220V 50/60Hz |
NOTE:
According to the needs of the experiment, you can choose the temperature, temperature zone, furnace size, vacuum system, flowmeter
Detailed Photos
Related photos of vacuum CVD furnace
Company Profile
FAQ
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact me.
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