| After-sales Service: | 12 Months |
|---|---|
| Warranty: | 12 Months |
| Application: | School, Lab |
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Plasma enhanced CVD coating system for deposition of silicon nitride, amorphous silicon and microcrystalline silicon thin films
Introduction of PECVD coater:
PECVD chemical vapor deposition adopts plasma enhanced chemical vapor deposition technology, which can use high-energy plasma to promote the reaction process, effectively increase the reaction speed and reduce the reaction temperature.
It is suitable for depositing thin films of silicon nitride, amorphous silicon and microcrystalline silicon on different substrates such as optical glass, silicon, quartz and stainless steel. It has good film-forming quality, less pinholes and is not easy to crack. It is suitable for the preparation of amorphous silicon and microcrystalline silicon thin film solar cell devices. It can be widely used in the scientific research and small batch preparation of thin film materials in Colleges and universities and scientific research institutes.
Technical parameters of PECVD coater:
|
Type |
TN |
|
Vacuum chamber |
front opening door,φ300mm X 300mm,stainless steel viewing window:φ100mm with baffle |
|
Vacuum pump set |
Front stage pump: rotary vane pump pumping speed is 1.1L/s Secondary pump: Turbo molecular pump pumping speed 600L/s |
|
Limiting vacuum |
10-6Pa 10-4Pa(Within 30 minutes) |
|
Vacuum(deposition) |
0.133~133Pa,adjusted according to the process |
|
RF power |
13.56MHz,500W (automatch) |
|
Flow control |
mass flowmeter(default Ar,0~200sccm) |
|
Dimensions |
1100mm x 800mm x1100mm |
Detail pictures of PECVD coater:
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have our own design team and factory with mature technical experience, and can guarantee the quality of products and the optimal price.
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