Pecvd Coating System for Deposition of Silicon Nitride, Amorphous Silicon and Microcrystalline Silicon Thin Films

• After-sales Service: 12 Months
• Warranty: 12 Months
• Application: School, Lab
• Customized: Customized
• Certification: CE
• Structure: Desktop
• Model NO.: CVD tube furnace
• Material: Stainless Steel
• Type: Tubular Furnace
• Gas Supply System: Gas Flow Flowmeter
• RF Power Output Power: 50W
• Vacuum Pump: Bipolar Rotary Vane Vacuum Pump
• Working Temperature: <=1200c
• Mass Flowmeter: up to 5ways
• RF Frequency: 13.56MHz
• Ultimate Vacuum: 10^-1PA
• RF: 13.56MHz+0.005%
• Heating Zone: Single Heating Zone 200mm
• Cooling Method: Forced Air Cooling
• Furnace Tube Size: Dia. 50*1200mm
• Furnace Tube Material: High Purity Quartz
• Transport Package: Standard Export Fumigation Sign Wooden Box Package
• Specification: 2400*800*1250mm
• Trademark: TN
• Origin: Henan China
• HS Code: 8486209000
• Production Capacity: 220/Month

Product Description

Plasma enhanced CVD coating system for deposition of silicon nitride, amorphous silicon and microcrystalline silicon thin films

 

Product Description

 

Introduction of PECVD coater:

PECVD chemical vapor deposition adopts plasma enhanced chemical vapor deposition technology, which can use high-energy plasma to promote the reaction process, effectively increase the reaction speed and reduce the reaction temperature.

It is suitable for depositing thin films of silicon nitride, amorphous silicon and microcrystalline silicon on different substrates such as optical glass, silicon, quartz and stainless steel. It has good film-forming quality, less pinholes and is not easy to crack. It is suitable for the preparation of amorphous silicon and microcrystalline silicon thin film solar cell devices. It can be widely used in the scientific research and small batch preparation of thin film materials in Colleges and universities and scientific research institutes.

 

Product Parameters

 

Technical parameters of PECVD coater:

Type	TN
Vacuum chamber	front opening door,φ300mm X 300mm,stainless steel viewing window:φ100mm with baffle
Vacuum pump set	Front stage pump: rotary vane pump pumping speed is 1.1L/s Secondary pump: Turbo molecular pump pumping speed 600L/s
Limiting vacuum	10^-^6Pa 10^-^4Pa(Within 30 minutes)
Vacuum(deposition)	0.133~133Pa,adjusted according to the process
RF power	13.56MHz,500W (automatch)
Flow control	mass flowmeter(default Ar,0~200sccm)
Dimensions	1100mm x 800mm x1100mm

 

Detailed Photos

 

Detail pictures of PECVD coater:

 

 

Company Profile

 

FAQ

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have our own design team and factory with mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. It is 5-10 days for the stocking goods. 2. It usually takes 30-60 days for the customized goods depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to our customer's  local requirements.

Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Made in China Trade Guarantee.

Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, We will find the most suitable way.

More questions, please feel free to contact me.