After-sales Service: | on-Line Service |
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Warranty: | One Year |
Type: | Magnetron Sputtering |
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Lab Vacuum Coating Machine Magnetron Sputter Coating for SEM
MAGNETRON SPUTTERING: OVERVIEW
Sputtering is a plasma based deposition process in which energetic ions are accelerated towards a target. The ions strike the target and atoms are ejected (or sputtered) from the surface. These atoms travel towards the substrate and incorporate into the growing film.
This DC power single magnetron target sputter coater is very suitable for aluminum plating and other materials that are very sensitive to air. This magnetron sputtering coater equipment has compact structure and perfect function and is easy to use, and is very suitable for various coating tests.
Specifications of magnetron sputtering coating:
Sample stage | Size | φ100mm |
Rotating speed | 0-20rpm adjustable | |
Heating | Max. 500ºC | |
Magnetron sputtering head | Quantity | 2" x1 |
Vacuum chamber | Chamber size | φ180mm x 215mm |
Observation window | Omnidirectional transparent | |
Chamber material | SS304 | |
Open method | Upper cover removable | |
Vacuum system | Mechanical pump | Rotary vane pump |
Pumping port | KF16 | |
Exhaust interface | KF16 | |
Molecular pump | Turbo-molecular pump | |
Pumping port | KF40 | |
Exhaust interface | KF40 | |
Vacuum measurement | Resistance gauge + ionization gauge | |
Ultimate vacuum | 1.0E-4Pa | |
Power supply | AC 220V 50/60Hz | |
Pumping rate | Mechanical pump 1.1L/s Molecular pump 600L/s | |
Power configuration | Quantity | DC power supply x1 |
Max. output power | DC power supply 500W | |
Supply voltage | AC220V, 50Hz | |
Others | Total power | 2KW |
Overall size | 550mm x 350mm x 500mm |
1. WE have magnetron sputtering coater with 1 target, 2 targets, 3 targets, 4 tagrst, etc. Target can be designed at the top or bottom of the chamber.
2. 0-1000W DC power or RF power target is available. Bias function is optional.
3. Target size: 1-inch, 2-inch, 3-inch, 4-inch, etc.
4. Strong magnetic target and Pernanent magenetic target is optional.
5. Magnetron sputtering coater with evaporation, E-beam is available.
6. Customized service is always available!
WE can ship the magnetron sputter coater by land, by sea, by air, by express, also can arrange package and shipment according to your requirements.
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
IS MAGNETRON SPUTTERING THE RIGHT PROCESS FOR YOUR WORK?
Please get in touch and we can collaborate on your project.
How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.