| After-sales Service: | 12 Months |
|---|---|
| Warranty: | 12 Months |
| Application: | School, Lab |
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The three heating zones of the tube furnace are independently temperature controlled by the precision temperature control instrument. By adjusting the temperature of each temperature zone, the tube furnace can form three temperature gradients in the heating zone or form a long constant temperature zone. Each zone can be edited with 30 sections temperature rise and fall program, with overheating and short circuit protection.
The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.
mass flowmeter:
The CVD coating machine is equipped with three-channel mass flow meter, which has high precision and high reliability. It can accurately mix 1~3 channels of gas. The operation panel adopts digital display, which is intuitive and efficient. If you have special needs, you can contact the technician to customize any number of gas channels.
vacuum system:
The CVD coating machine is also equipped with a precision molecular pump set, which can achieve a vacuum degree of 1.0E-3pa, which can provide users with a purer and more stringent experimental environment than ordinary mechanical pumps.
applications:1200ºC three heating zone high vacuum CVD furnace
This CVD coating machine is used by its customers to research, design, and manufacture these materials or coatings for aerospace engine components, medical implants, semiconductors, solar cells, smart glass, carbon nanotubes, nanowires, LEDs, MEMS, and other applications.
| m tube furnace | Model | TN-O1200-50IIIT | ||
| Tube material | High purity quartz | |||
| Tube diameter | 50mm (Optional 60mm, 80mm, 100mm) | |||
| Tube length | 1300mm | |||
| Furnace chamber length | 1060mm | |||
| Heating zone length | 300mm+300mm+300mm | |||
| Operating temperature | 0~1100ºC | |||
| Temperature control accuracy | ±1ºC | |||
| Temperature control mode | 30 or 50 segment program temperature control | |||
| Display mode | LCD | |||
| Sealing method | 304 stainless steel vacuum flange | |||
| Flange interface | 1/4" ferrule connector, KF16/25/40 joint | |||
| Vacuum | 4.4E-3Pa | |||
| Power supply | AC:220V 50/60Hz | |||
| Gas supply system | Model | CY-3Z | ||
| Gas channel | 3-channel | |||
| Measuring unit | Gas mass flow meter | |||
| Measuring range | A channel: 0~100 SCCM H2 gas | Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected. | ||
| B channel: 0~300SCCM N2 gas | ||||
| C channel: 0~500SCCM Ar gas | ||||
| measurement accuracy | ±1.0%F.S | |||
| Pipe pressure resistance | 3MPa | |||
| Working pressure difference | 50~300KPa | |||
| Connecting pipe | 304 stainless steel | |||
| Gas channel | 304 stainless steel needle valve | |||
| Interface specification | 1/4" ferrule connector for gas inlet and outlet | |||
| Exhaust system | Model | CY-GZK103-A | ||
| Molecular pump | CY-600 | |||
| Backing pump | Rotary vane pump | |||
| Pumping rate | Molecular pump: 600L/S | Comprehensive gas pumping performance: 30 minutes vacuum can reach: 1.0E-3Pa | ||
| Rotary vane pump: 1.1L/S | ||||
| Pumping interface | KF40 | |||
| Exhaust interface | KF16 | |||
| Vacuum measurement | Compound vacuum gauge: Resistance gauge + ionization gauge | |||
| Ultimate vacuum | 1.0E-5Pa | |||
| Power supply | AC:220V 50/60Hz | |||
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
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