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Audited Supplier 13.56MHZ RF Generator for PECVD Tube Furnace / plasma RF power supply for Plasma etching, Plasma cleaning, plasma
The TN-RFG series RF power supply adopts the current stable and reliable power amplifier and the company's core DC control system, so that the product has very stable performance and high product reliability. Adopt Chinese and English display interface, easy to operate. Mainly used in photovoltaic industry, flat panel display industry, semiconductor industry, chemical industry, laboratory, scientific research, manufacturing, etc.
Features of RF power supply generator
1. Rack installation
2. Adopt full digital control, with convenient and rich operation menu
3. The incoming line has APFC module, which improves the power factor of the input side and reduces the harmonics
4. Stable and reliable power amplifier and DC control module
5. The rated power can still be output when the standing wave is 1.5
6. With a variety of optional communication interfaces, through the communication interface, the power supply can be completely
operated
7. Bright LCD display, intuitive operation
8. With CEX phase synchronization function
9. Triple programmable analog outputs
10. Perfect protection function
TN-AG-1310 1000W RF Power Supply Specification Sheet
| Advantages | Functions |
| • Longer normal operation time of the manufacturing process • Higher operational simplicity and flexibility • Stable and reliable power amplifier and DC module solutions • Long-term ease of use, cost savings • Comprehensive after-sales service and support |
• High Efficiency - Low Heat Generation • Communication: Selection of 15-pin and 25-pin analog user ports, RS-232/485 • Multi-functional Front Panel • Convenient and Comprehensive Operation Menu • CEX (Carrier Excitation) Operation Mode • Comprehensive Reflected Power Protection |
| Signal Frequency | 13.56 MHz±0.005% |
| Power Output Range | 5W-1000W |
| Maximum Reflected Power | 200W |
| RF Output Interface | 50 Ω, N-type, female |
| Power Stability | ±0.5% |
| Harmonic Components | ≤-50dbc |
| Power Supply Voltage | Single-phase AC (187V-253V) Frequency 50/60HZ |
| Overall Efficiency | ≥70% |
| Cooling Method | Air Cooling |
| Overall Weight | 17.5kg |
| Size | 88 mm (H)×483 mm (W)×500 mm (D) 3.46" (H)×19" (W)×19.69" (D) |
| Advantages | Features |
| Improve productivity, increase output, and reduce production costs • Long-term stable process time guarantee • Easy installation and operation |
• Fast, accurate, and repeatable impedance matching • Optimal, ready-to-use functions that meet the needs of multiple application fields • Multiple power and frequency ranges |
| Model | AM-1315 |
| Frequency | 13.560MHz |
| Maximum Transmission Power | 1500w |
| Reflected Power (at Maximum Power) | <3w |
| Maximum Load Current | 30ARMS |
| Maximum Load Voltage | 7000VRMS |
| RF Input Connector | 50 Ω, UHF (or N-type), female |
| Matching Time | <3 seconds after finding the matching range |
| Matching Impedance Range | 0~80Ω -j200~~+j100 |
| Cooling Method | Air Cooling |
| Weight | 6.5kg |
| Size | 430mm (D) *220mm (W) * 130mm (H), or customizable |
We can ship the plasma RF generator by sea, by air, by land, by Express, also can arrange the shipment according to your requirements.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, having our own design team and factory with mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Made in China Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact us.
Suppliers with verified business licenses
Audited Supplier 
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