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Audited Supplier MAGNETRON SPUTTERING: OVERVIEW
Sputtering is a plasma based deposition process in which energetic ions are accelerated towards a target. The ions strike the target and atoms are ejected (or sputtered) from the surface. These atoms travel towards the substrate and incorporate into the growing film.
Dual Target Magnetron Sputter and Thermal Evaporation PVD Coating Machine
Magnetron sputter & thermal evaporation two-in-one coating machine can be used for the coating of electronic products, glass, ceramic samples, metal and other samples, especially suitable for sample preparation of laboratory SEM (scanning electron microscope).
The equipment is mainly composed of stainless steel vacuum chamber, magnetron sputtering target, evaporation source, rotary heating sample table, vacuum pump unit, vacuum measurement gauge, air intake system and control system.
Specifications of dual target magnetron sputtering coater with thermal evaporation
| Model | TN-MS500S-2TA1S | |||
| Sample table | Size | 150mm Dia. | Heating | ≤500ºC |
| Rotation speed | 1-20r/min | Temp control | ±1ºC | |
| Magnetron sputter head | Quantity | 2-inch ×2 | Cooling mode | Water cooled |
| Thermal evaporation | evaporator source | Tungsten wire basket | Max temp | 1500ºC |
| Thermocouple | S type | |||
| Vacuum chamber | Size | 300mmDia.× 300mmH | Watch window | 100mm Dia. |
| Material | 304 SUS | Open mode | Front opening door | |
| Vacuum system | Mechanical pump | Rotary vane pump | Extraction interface | KF16 |
| Pumping | 1.1L/s | |||
| Molecular pump | Turbo molecular pump | Extraction interface | CF150 | |
| Pumping | 600L/s | Exhaust interface | KF40 | |
| Vacuum gauge | Resistance gauge + ionization gauge | |||
| Ultimate vacuum degree | 1.3x10-4Pa | Power supply | AC;220V 50/60Hz | |
| Sputter power supply | DC power supply | 1 set | Output power | ≤1000W |
| Output voltage | ≤600W | Response time | <5ms | |
| RF power supply | 1 set | Output power | ≤1000W | |
| Power stability | ≤5W | |||
| RF frequency | 13.56MHz | RF stability | ±0.005% | |
| Film thickness gauge | Resolution | ±0.03Hz | Accuracy | ±0.5% |
| Upper range limit | 50000 | Speed | 100~1000ms | |
| Water cooled system | Tank volume | 9L | Flow | 10L/min |
| Gas system | Flowmeter type | MFC(mass flow meter) | Range | 200sccm |
| Gas type | Ar | |||
Other |
Input supply | AC220V,50Hz | Size | 1400x750x1300mm |
| Total power | 4kw(host+vacuum pump) | Weight | 295kg | |
1. WE have magnetron sputtering coater with 1 target, 2 targets, 3 targets, target can be designed at the top or bottom of
the chamber.
2. DC or RF target is available.
3. Different target material is optional
4. Strong magnetic target and Pernanent magenetic target is optional
5. Magnetron sputtering coater with evaporation source is available
6. Customized service is always available!
Dual target sputtering coater with 2 DC power
Dual target magnetron sputtering coater with reciprocating sample stage
Dual target magnetron sputtering coater with bottom target
Dual target sputtering coater with thermal evaporation source
WE can ship the magnetron sputter coater by land, by sea, by air, by express, also can arrange package and shipment according to your requirements.
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
IS MAGNETRON SPUTTERING THE RIGHT PROCESS FOR YOUR WORK?
Please get in touch and we can collaborate on your project.
How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.
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