| After-sales Service: | 12 Months |
|---|---|
| Warranty: | 12 Months |
| Type: | Coating Production Line |
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This equipment is a single-target magnetron sputtering coater instrument, which can be used for the preparation of general metal thin films. At the same time, the equipment is equipped with a bias power supply, which can be used for plasma cleaning before sputtering and exerting bias during sputtering.
This single-target magnetron sputtering coater is equipped with high vacuum stainless steel cavity, the cavity is set with a quartz observation window baffle, which is easy to observe and record the experiment; The cavity design with excellent vacuum performance and small shape makes it very suitable for laboratory use. At the same time, the equipment is equipped with a rotating heating sample table, which can effectively improve the film uniformity and film quality. The machine adopts modular design, simple operation logic, intuitive operation interface, easy to get started.
| Product Name | Desktop single-target magnetron coater with bias voltage |
| Product Model | TN-MSZ180PX-I-DC-Q (Bias voltage) |
| Installation Condition | 1,Working environment temperature: 25ºC±15ºC,humidity: 55%Rh±10%Rh; 2,Equipment power supply:AC220V,50Hz, must be well grounded; 3,Rated power:1000w; 4,Equipment for gas:The equipment chamber should be filled with argon gas for cleaning. The customer should prepare argon gas with purity ≥99.99%. 5,Table size requirements: 600mm×600mm×850mm,bearing capacity ≥ 50kg; 6,The position should be well ventilated and cooled. |
| Technical Indicators |
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| Notice | 1,Magnetron sputtering has a high working vacuum, generally within 2Pa, and needs to be used with molecular pump. 2,In order to achieve a high oxygen free environment, the vacuum chamber should be cleaned at least 3 times with high purity inert gas. 3,Magnetron sputtering is sensitive to the air intake, so mass flow meter is needed to control the air intake |
| Optional Accessory | |
| Film thickness monitor | 1,Film thickness resolution:0.0136Å(aluminum) 2,Accuracy of film thickness :±0.5%,it depends on process conditions, especially sensor position, material stress, temperature and density 3,Measuring speed:100ms-1s/times,measurement range can be set :500000Å(aluminum) 4,Standard sensor crystal:6MHz 5,Suitable for wafer frequency:6MHz suitable for wafer size:Φ14mm mounting flange:CF35 |
| Another accessory | 1,CY-CZK103 series high performance molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~105Pa)CY-GZK60 series small molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~102Pa) VRD-4 bipolar rotary vane vacuum pump 2,KF25 Vacuum bellows; The length can be 0.5m, 1m or 1.5m. KF40 clamp bracket 3,Film thickness meter crystal oscillator. |
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have our own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Made-in-China Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact us.
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