1200c Three Heating Zone Roll to Roll Pecvd Tube Furnace Plasma Enhance Chemical Vapor Deposition System

• After-sales Service: on-Line Service
• Warranty: One Year
• Application: Industry, School, Lab
• Customized: Customized
• Certification: CE
• Structure: Portable
• Model NO.: TN-OTF-1200X-III-PE300-RR
• Material: Stainless Steel
• Type: Tubular Furnace
• Product Name: Pecvd Machine
• Tube Material: High Purity Quartz
• Temperature: 1200c
• Heating Zone: 200mm*1
• Furnace Tube Size: 50*450mm
• Temperature Accuracy: ±1ºC
• Transport Package: Fumigated Wooden Box
• Trademark: TN
• Origin: China
• HS Code: 8401200000
• Production Capacity: 20 Sets Per Month

Product Description

Product Description

1200C three heating zone roll to roll PECVD tube furnace plasma enhance chemical vapor deposition system

PECVD with roll to roll system

1. The instrument is a plasma enhanced chemical vapor deposition device (PECVD) equipped with a roll-to-roll movement system.
    It is not only used in the continuous heat treatment process of wire rod, such as the preparation of carbon fiber, the modification
    of alloy and other materials wire rod, but also used for the continuous growth of graphene on the coil.

2. The PECVD system has five parts: roll-to-roll movement system, 1200ºC*2-heating-zone open tube furnace, PE plasma
    enhancement system, vacuum system and three-way proton flowmeter gas supply system. The whole system can work in the
    vacuum / atmosphere protection environment.

3. The speed of the winding device can be adjusted from 1 to 400mm / min, and the mechanism adopts feedback adjustment,
    which can automatically correct the speed deviation and ensure the speed stability of the sample, thus ensuring the accuracy of
    the experiment.

Product Parameters

Specifications of roll-to-roll PECVD system

Performance specifications and basic configurations
Product name	Roll to roll PEVCD
Product model	TN-OTF-1200X-III-PE300-RR
1000W Plasma source	Output power:50-1000W  Maximum adjustable ±1% RF rate: 13.56MHz,stability±0.005% dB:≤55DB Cooling mode :forced air cooling Input power:1KW  AC 220V
Three proton flow meter control system	Voltage:AC220V/50Hz Power:23W PLC touch screen control Size of mixing tank:φ80*120mm Operating temperature:5~45ºC Maximum pressure: 3x106 Pa Precision : ±1.5% FS Linear: ±(0.5-1.5)%F.S. Repeated accuracy: ±0.2%F.S. Range of flow: The first path : 1~50 SCCM (Methane calibration) The second path: 1~200 SCCM (Hydrogen calibration) The third path: 1~200 SCCM (Argon calibration) Other options are available for gas type calibration according to customer requirements
Vacuum measure unit	Model:PCG-800 Indication range:3.8E-5 to 1125torr Precision: 5×10-4 … 1×10-3 mbar (N2) % of reading ±50 1×10-3 … 100 mbar (N2) % of reading ±15 100 … 950 mbar % of reading ±5 950 … 1050 mbar % of reading ±2.5
Low vacuum unit	It is composed of double-rotating mechanical pump, double-layer vertical oil mist filter (PE material), resistance vacuum gauge and connecting pipe joint  Suction rate of vacuum pump≥4.4L/s Limit vacuum degree 10^-1Pa Vacuum gauge measuring range 10^-1Pa-10^5 Pa
Reel-to-reel sealing devices for copper foil	Coil to coil winding and unwinding mechanism is used to move copper foil in and out of the material, and the moving speed of copper foil is adjustable from 1-400mm/min. Configure a roll of test copper foil. The winding and unwinding mechanism is placed in the vacuum chamber at both ends of the tube furnace to ensure that the copper foil can move under sealed growth conditions and achieve large-scale preparation A cooling device is set between the winding mechanism and the tubular furnace for rapid cooling of copper foil.
Product size	About 2400*800*1250mm
Product weight	About 720kg
Quality certificate	CE
Warranty period	Special note:   1. Consumables such as heating element, quartz tube, sample crucible, etc. are not included.   2. Damage caused by corrosive and acidic gases is not covered by the warranty.

Detailed Photos

1. WE have CVD/PECVD machine with gas supply system+vacuum system+tube furnace + plasma generator.

2. Tube furnace (temperature) :1200C, 1400C, 1600C, customized temperature is avaliable.

3. Tube furnace (heating zone) :single zone, dual zone, triple zone, customized No. of heating zone is avaliable.

4. Tube Material: quartz, corundum, alloy, and other material of tube is customizable.

5. Tube with different diameter and length is customizable.

6. Plasma generator: 100W, 150W, 300W, 500W, 1000W, and other power of plasma generator is customizable.

7. Flowmeter: 1~3 or multi channel flow meter is optional based on your process.

CVD-- tube furnace with 1200C single heating zone 

PECVD-- tube furnace with triple heating zone 


PECVD-- roll- to- roll
PECVD-- rotary type
 

Other machines:

Company Profile

Packaging & Shipping

We can ship the CVD, PECVD machine by sea, by air, by land and by Express, also we can arrange shipment according to your requirements.

FAQ

Q. Are you manufacturer or trading company?
A. We are professional manufacturer of  laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service. 

Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.

Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.

Q. How to pay?
A. T T, L / C, D / P, etc.

Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.

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