| After-sales Service: | on-Line Service |
|---|---|
| Warranty: | One Year |
| Application: | Industry, School, Lab |
Suppliers with verified business licenses
Audited Supplier Audited by an independent third-party inspection agency
1200C three heating zone roll to roll PECVD tube furnace plasma enhance chemical vapor deposition system
Specifications of roll-to-roll PECVD system
| Performance specifications and basic configurations | |
| Product name | Roll to roll PEVCD |
| Product model | TN-OTF-1200X-III-PE300-RR |
| 1000W Plasma source | Output power:50-1000W Maximum adjustable ±1% RF rate: 13.56MHz,stability±0.005% dB:≤55DB Cooling mode :forced air cooling Input power:1KW AC 220V |
| Three proton flow meter control system | Voltage:AC220V/50Hz Power:23W PLC touch screen control Size of mixing tank:φ80*120mm Operating temperature:5~45ºC Maximum pressure: 3x106 Pa Precision : ±1.5% FS Linear: ±(0.5-1.5)%F.S. Repeated accuracy: ±0.2%F.S. Range of flow: The first path : 1~50 SCCM (Methane calibration) The second path: 1~200 SCCM (Hydrogen calibration) The third path: 1~200 SCCM (Argon calibration) Other options are available for gas type calibration according to customer requirements |
| Vacuum measure unit | Model:PCG-800 Indication range:3.8E-5 to 1125torr Precision: 5×10-4 … 1×10-3 mbar (N2) % of reading ±50 1×10-3 … 100 mbar (N2) % of reading ±15 100 … 950 mbar % of reading ±5 950 … 1050 mbar % of reading ±2.5 |
| Low vacuum unit | It is composed of double-rotating mechanical pump, double-layer vertical oil mist filter (PE material), resistance vacuum gauge and connecting pipe joint Suction rate of vacuum pump≥4.4L/s Limit vacuum degree 10-1Pa Vacuum gauge measuring range 10-1Pa-105 Pa |
| Reel-to-reel sealing devices for copper foil | Coil to coil winding and unwinding mechanism is used to move copper foil in and out of the material, and the moving speed of copper foil is adjustable from 1-400mm/min. Configure a roll of test copper foil. The winding and unwinding mechanism is placed in the vacuum chamber at both ends of the tube furnace to ensure that the copper foil can move under sealed growth conditions and achieve large-scale preparation A cooling device is set between the winding mechanism and the tubular furnace for rapid cooling of copper foil. |
| Product size | About 2400*800*1250mm |
| Product weight | About 720kg |
| Quality certificate | CE |
| Warranty period | Special note: 1. Consumables such as heating element, quartz tube, sample crucible, etc. are not included. 2. Damage caused by corrosive and acidic gases is not covered by the warranty. |
1. WE have CVD/PECVD machine with gas supply system+vacuum system+tube furnace + plasma generator.
2. Tube furnace (temperature) :1200C, 1400C, 1600C, customized temperature is avaliable.
3. Tube furnace (heating zone) :single zone, dual zone, triple zone, customized No. of heating zone is avaliable.
4. Tube Material: quartz, corundum, alloy, and other material of tube is customizable.
5. Tube with different diameter and length is customizable.
6. Plasma generator: 100W, 150W, 300W, 500W, 1000W, and other power of plasma generator is customizable.
7. Flowmeter: 1~3 or multi channel flow meter is optional based on your process.
Zhengzhou Tainuo Film Materials Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.
Our company's main products are: spin coater, thermal evaporation coater, magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.
Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, Brazil, etc. and have established long-term cooperative relationships with local dealers.
If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!
We can ship the CVD, PECVD machine by sea, by air, by land and by Express, also we can arrange shipment according to your requirements.
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
SHALL WE DISCUSS YOUR PROJECT?
Please get in touch and we can collaborate to get you the answers and solutions you need.
How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.
){kind=link}