| After-sales Service: | 12 Months |
|---|---|
| Warranty: | 12 Months |
| Type: | Coating Production Line |
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High Vacuum Multi-Sources
Evaporation Deposition Coating Machine with 2 Tungsten Boat
This equipment is a multi-source high-vacuum evaporation coating equipment. The equipment adopts a front-opening vacuum chamber design. The chamber has a large space and strong expandability, which can meet the evaporation coating of multiple types of large-size samples. The chamber has an upper sample stage inside, and the clamping or clamping type sample mounting parts can be selected according to the user's sample style. The sample table can be rotated, heated and raised and lowered, and all operations are integrated and controlled through the touch screen. The vacuum pump set of the equipment is a two-stage vacuum system, which is composed of a dual stage rotary vane vacuum pump and a turbo molecular pump. It can provide a clean and oil-free high vacuum environment for the vacuum coating test; the vacuum system contains a complete pneumatic valve system, and the user can One-touch operation through the touch screen realizes vacuuming, non-stop load and unload sample, complete shutdown and other operations.
The equipment has two sets of evaporation sources. It adopts a tungsten boat evaporation source and water-cooled copper electrodes. It can support a maximum current of 300A and a heating temperature of up to 3000ºC. It can realize the evaporation of various refractory metals. This equipment adopts an integrated design, and the chamber and the electric control part are separated left and right, which realizes the separation of water and electricity, and effectively guarantees the safety of users. The electric control part adopts the design of the combination of touch screen and button panel. The vacuum system, sample table and other auxiliary functions are operated by the touch screen with one button. The evaporation and the film thickness control are operated independently by the panel, which is as convenient for users as possible while avoiding the possibility of wrong operation. The equipment is well-designed and has excellent performance, and it is an indispensable choice for laboratory high-precision evaporation coating test.
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Sample stage |
Size |
Max support φ150mm sample |
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Height |
Adjustable up and down 70mm |
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Evaporation source |
Quantity |
Tungsten Boat x2 |
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Vacuum chamber |
Chamber size |
Dia. 300mm x 400mm |
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Chamber material |
304 stainless steel |
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Observation window
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Front φ100mm with shading sheet |
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Opening method |
Front door open |
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Film thickness control |
Crystal vibrating film thickness measuring instrument, optional multi-channel film thickness controller |
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Vacuum system |
Backing pump |
Dual stage rotary vane pump |
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Pumping port |
KF16 |
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Secondary pump |
Turbo molecular pump |
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Pumping port |
CF160 |
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Vacuum measurement |
Resistance + ionization Compound vacuum gauge |
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Ultimate vacuum |
1.0E-5Pa |
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Pumping rate |
Rotary vane pump: 1.1L / S |
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Exhaust rate |
Mechanical pump 1.1L / s Molecular pump 600L / s |
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Power supply |
AC 220V 50/60Hz |
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Flow meter |
One channel mass flow meter 500sccm Ar gas |
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Control System |
PLC automatic control Operation interface: touch screen + operation panel |
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Other |
Supply voltage |
AC380V,50Hz |
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Total power |
5kW |
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Machine size |
1000mm x 800mm x 1500mm |
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Machine weight |
350kg |
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| 3*3 mm 5N |
| 6*6 mm 5N |
| Diameter 1.2mm (1mm tungsten wire, 0.2mm chromium) L:90mm |
| 90*13*3 mm The tank size 25mm*10mm*2mm |
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, having our own design team and factory with mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Made in China Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact us.
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