| After-sales Service: | 12 Months |
|---|---|
| Warranty: | 12 Months |
| Type: | Coating Production Line |
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| Input Power |
·Single phase 110 VAC, 50 / 60 Hz ·1000 W (including vacuum pump and water chiller) |
| Magnetron Sputtering Head |
·Three 2" magnetron sputtering heads with water cooling jackets are included and inserted into quartz chamber via quick clamps ·RF cable replacement can be purchased at CYKY ·One manually operated shutter is built on the flange ·One 10 L/min digitally controlled recirculating water chiller is included for cooling sputtering heads |
| Sputtering Target | ·Target size requirement: 2" diameter x 1/8" thickness max ·Sputtering distance range: 50 - 80 mm adjustable ·Sputtering angle range: 0 - 25° adjustable ·2" diameter Cu target and Al2O3 target are included for demo testing ·Various oxide 2" sputtering targets are available upon request at extra cost ·For target bonding, 1 mm and 2 mm copper backing plates are included. |
| Vacuum Chamber | ·Vacuum chamber: 300 mm OD x 500 mm Height, made of stainless steel ·Sealing flange: 274 mm Dia. made of Aluminum with high-temperature silicone O-ring ·Stainless steel shield cage is included for 100% shielding of RF radiation from the chamber ·Max vacuum level: 1.0E-5 Torr with optional turbo pump and chamber baking |
| Sample Holder | ·Sample holder is a rotatable and heatable stage made of ceramic heater with stainless steel cover ·Sample holder size: 50 mm Dia. for. 2" wafer max ·Rotation speed: 1 - 10 rpm adjustable for uniform coating ·The holder temperature is adjustable from RT to 600 °C max (5 min max at 600 °C; 2 hr max at 500 °C) with accuracy +/- 1.0 °C via a digital temperature controller |
| Vacuum Pump | ·KF40 vacuum port is built in for connecting to a vacuum pump. ·Vacuum level: 1.0E-2 Torr with included dual stage mechanical pump 1.0E-3 Torr with optional turbo pump |
| Size | 540 mm L x 540 mm W x 1000 mm H |
| Packing Weight | About 145 kg |
| Warranty | One years limited warranty with lifetime support |
| Whether to support customization | yes |
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have our own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Made-in-China Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact us.
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