Bottom Target Dual Target DC RF Magnetron Sputtering Coater Machine

• After-sales Service: 12 Months
• Warranty: 12 Months
• Type: Coating Production Line
• Coating: Vacuum Coating
• Substrate: Steel
• Certification: CE
• Condition: New
• Cooling Mode: Water Cooling
• Heating Temperature: Max 500ºC
• Rotate Speed: 1-20rpm Adjustable
• Substrate Size: Diameter 185mm
• Vacuum Chamber: Stainless Steel
• Magnetron Sputtering Target Head: 2 Magnetron Sputtering Heads
• Sample Stage Size: Maximum 4" Substrate Can Be Placed
• Rotated Speed: 1-20 Rpm (Adjustable)
• The Highest Heating Temperature: 500ºC
• Temperature Control Accuracy: +/- 1.0 °c
• Gas Flow Controller: 2 Mass Flow Meters Installed Inside The Instrument
• Vacuum Pump: a Set of Molecular Pump System, Using One-Button O
• Cooling System: 16L/Min.
• Transport Package: Fumigated Wooden Box
• Specification: 290mmx365mmx260mm
• Trademark: TN
• Origin: China
• HS Code: 8486209000
• Production Capacity: 200/Month

Product Description

Dual target DC RF magnetron sputtering coating machine---bottom target type

Product Description

Dual target DC RF magnetron sputtering coating machine---bottom target type is a special laboratory coating machine with two targets developed by our company. It is equipped with a DC power supply and a RF power supply. It can be used to prepare single or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, etc.

Features

1. Compared with the conventional plasma sputtering, magnetron sputtering has the advantages of high energy, high speed, high deposition rate and low sample temperature rise;
2. The magnetron target is equipped with water-cooled interlayer. The water cooler can effectively take away heat and avoid heat accumulation on the target surface, so that the magnetron coating can work stably for a long time;
3. This model adopts the layout of under target, the sample table is on the top, and the height with the target surface can be precisely adjusted by program, and can be rotated and heated, with excellent performance.

Product Parameters

Model		CY-MSP500S-DCRF-B
Input		AC220V,50Hz
Total power		6KW
Ultimate vacuum degree		5x10-4Pa
Sample table parameters	Size	150 Dia.
	Height	70 mm adjustable
	Heating	≤500ºC
	Rotation speed	1-20 rpm
Magnetron sputtering head parameters	Quantity	2-set,2-inch
	Cooling mode	Water cooled,required flow rate10L/min
	Water chiller	10L/min circulating water cooling
Vacuum chamber	Size	500mmDia. × 490mm H
	Material	Stainless steel
	Watch window	100mm Dia.
	Open mode	front opening door
Gas flow controller		1channel 200sccm Ar;
Vacuum pump		Molecular pump system pumping,600L/S
Film thickness gauge		Quartz vibrating film thickness gauge , one set,Resolution 0.10 Å
Sputter power supply		DC power supply:one set,500W,for metal films RF power supply:one set,500W,for non-metallic films
Operating mode		All-in-one computer operation
Overall dimensions		1090mm X 900mm X 1250mm
Total weight		350kg

Detailed Photos

 

 

 

FAQ

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have our own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact us.

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