| After-sales Service: | on-Line Service |
|---|---|
| Warranty: | One Year |
| Type: | Thermal Evaporation Coater |
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Lab Triple Evaporation Source Vacuum Coating Machine Fim Coater with Glove Box
OVERVIEW--THERMAL EVAPORATION
Thermal evaporation is a popular physical vapor deposition technique because of its simplicity. During this process, a material in a high-vacuum environment is heated to its evaporation point by joule heating of the resistive boat in which it is located. The vaporized molecules then travel from the source to the substrate where they nucleate together, forming a thin film coating. A wide variety of materials can be deposited using this technique such as aluminum, silver, nickel, chrome, magnesium, among many others.
The coating equipment consists of vacuum chamber, metal/organic source system, sample stage system, vacuum pump set, film thickness monitor system, equipment rack, and electronic control system. The front door of the vacuum chamber can be connected to the glove box, and an integrated design scheme is adopted. The whole set of equipment is compact in structure and simple in layout, so as to avoid the messy appearance of experimental equipment.
Specifications of thermal evaporation coater
| 1.Vacuum Chamber | ||
| Appearance | 1 set of high-quality 304 stainless steel D-shaped vacuum chamber, the internal size of the vacuum chamber is D400*480mm, the front and rear double doors, and the rear door adopts a hinged square door, which is convenient for cleaning the vacuum chamber, internal debugging, maintenance and pick-and-place samples; The front door adopts horizontal pull square door, and each front and rear door is equipped with 1 set of DN100 windows; |
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| Bottom | 2 sets of metal source interfaces, 4 sets of organic source interfaces, 1 set of molecular pump interface, 2 sets of lighting interfaces and 3 sets of film thickness probe interfaces; | |
| Top | 1 set of sample stage interface, 1 set of electric baffle interface, 1 set of high vacuum pneumatic baffle valve interface; | |
| Left side | 1 set of high vacuum pneumatic flapper valve interface. | |
| 2.Metal/Organic Source System | ||
| Metal source | Quantity: 2 sets 2 sets of water-cooled copper electrodes, compatible with evaporation boats (tungsten, molybdenum and tantalum boats) and spiral wires, equipped with pneumatic baffles, 1 set of 1KW DC constant current power supply (digital display), current adjustment accuracy 1A (fine adjustment), the power meets common Evaporation of metals and metal oxides; |
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| Organic source | Quantity: 4 sets 4CC quartz boat, 2 temperature control power supplies (temperature control meter display accuracy 0.1°C), temperature range: RT~500°C (temperature control accuracy ±1°C), with pneumatic baffle; |
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| Baffle | The evaporation source is independent from each other, and the baffle is separated to avoid cross contamination | |
| 3.Sample Stage System | ||
| Substrate rotation | The speed is continuously adjustable from 0 ~ 30 rpm; | |
| Substrate lifting | Electric lifting, the distance between the substrate and the evaporation source is 200~300mm continuously adjustable through the touch screen; | |
| Sample holder | 20*20mm substrate 8 pieces | |
| Substrate shutter | Electric shutter | |
| 4.Vacuum System | ||
| Vacuum pump set | 1) 1 set of 600L/s molecular pump; 2) 1 set of 8L/s rotary vane pump 3) 1 set of CF150 high vacuum pneumatic gate valve; 4) 1 set of CF40 high vacuum pneumatic flapper valve; 5) 2 sets of KF16 high vacuum pneumatic flapper valves; 6) 1 set of KF40 high vacuum pneumatic flapper valve; 7) 1 set of KF40 vacuum solenoid valve; 8) 2 sets of KF40 pump valve connecting hoses, 1 set of KF40 tee; 9) 1 set of digital vacuum gauge (measurement range: 1×105~1×10-5Pa) |
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| 5.Film Thickness Monitor System | ||
| Film thickness meter | 1 set of three-channel quartz crystal film thickness monitor | |
| Film thickness probe | 3 sets of CF35 water-cooled film thickness probe | |
| 6.Equipment Rack | ||
| 1) 1 set of 40 carbon steel square tube welding frame; 2) 4 pieces of universal wheels, move and adjust; 3) 4 pieces of M16 feet, locked and positioned. |
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| 7.Electronic Control System | ||
| Power supply of metal source | 1 set | |
| Power supply of organic source | 2 sets (one for two) | |
| Evaporation source baffle power supply | 1 set | |
| Three-channel quartz crystal film thickness monitor | 1 set | |
| Sample table and its baffle power supply | 1 set | |
| Baking lighting power supply | 1 set | |
| PLC control | 1 set, equipped with touch screen | |
| Total control power supply | 1 set | |
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| Chamber size | L1200* W750* H900mm | |
| Gloves | 1 pair | |
| Large antechamber | Inner diameter 360mm, length 600mm | |
| Small antechamber | Inner diameter 150mm, length 300mm | |
| 9.Other Parameters | ||
| 1) Phase loss protection, misoperation protection, linkage interlock and one-key vacuum start and stop functions; 2) Power supply: ~220V two-phase power supply system (peak 3KW); 3) Water supply: small chiller, cooling water temperature 5ºC~35ºC, working environment temperature: 10ºC~40ºC; 4) Air supply: small oil-free silent air pump, providing 0.2-0.3MPa air pressure to drive pneumatic valves; 5) Ultimate vacuum: 6×10-5Pa, the time from atmosphere to 6×10-4Pa is less than 35 minutes (fill with dry nitrogen), shut down for 12 hours vacuum degree≤10Pa. |
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1. We have thermal evaporation coater with 1/2/3/4/8... evaporation sources, can evaporation metal and organic material
2. Chamber material: High purity quartz--- low vacuum, SS304 chamber-- high vacuum
3. Film thickness monitor is optional
4. Thermal evaporation, E-beam, magnetron sputtering in one machine is available
5. Different material of evaporation source is available
6. Customize thermal evaporation coater according to your process is available
Zhengzhou Tainuo Film Materials Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.
Our company's main products are: spin coater, thermal evaporation coater, magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.
Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, Brazil, etc. and have established long-term cooperative relationships with local dealers.
If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
WE WANT TO HEAR ABOUT YOUR PROCESS!
Please get in touch and we can collaborate on your project. When we work together, amazing things can happen. Your brilliant ideas with our innovative team will create the tool that will bring your research or production to the next level. We're looking forward to hearing from you.
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