| After-sales Service: | 12 Months |
|---|---|
| Warranty: | 12 Months |
| Type: | Coating Production Line |
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Three target heads plasma sputtering coater is a cost-effective plasma sputter coating equipment independently developed by our company. The plasma sputtering target is a standard size of 2 inches. Customers can choose different configurations of 1~3 target heads according to their needs to meet the different experimental needs of single-layer film or multilayer films of various materials. The instrument is equipped with a 150W DC high-voltage power supply, which can be used for metal sputter coating, especially for the coating of metals such as gold, silver and copper. This film coater is equipped with a gas connection for the introduction of protective gas. The instrument adopts touch screen control, which is simple and intuitive to use. It can realize the operation of coating start and stop, switch target head position and baffle rotation with one button, which is very suitable for laboratory purchase.
This film coater is equipped with a two-stage rotary vane vacuum pump. It has the advantages of small volume, quick vacuuming and simple operation. If customers need to further improve the vacuum degree, you can contact the technician to select the molecular pump group to form a high vacuum system.
Application of three target heads plasma sputtering coater:
It can be used for metal sputter coating, especially for metal coatings such as gold, silver and copper.
| Product model | TN-PLZ180-III-DC-Q | |
| Sample stage | Size | 100mm |
| Distance from sample stage to target surface | 20~35mm height adjustable | |
| Rotating speed | / | |
| Heating temperature | / | |
| Temperature control accuracy | / | |
| Plasma sputtering source | Quantity | 2 inches * 3 |
| Cooling method | Natural cooling | |
| Vacuum chamber | Chamber size | φ180mm * 200mm |
| Observation window | Omnidirectional visibility | |
| Chamber material | High purity quartz | |
| Open method | Top cover removable | |
| Upper and lower cover material | 304 stainless steel | |
| Pumping port | KF16 | |
| Intake port | 1/4 inch ferrule connector | |
| Power configuration | Quantity | DC power supplyx1 |
| Output power | Max. 150W | |
| Sputtering power | 1200V | |
| Max. sputtering current | 50mA | |
| Vacuum system | Vacuum pump type | Dual-stage rotary vane vacuum pump |
| Pumping port | KF16 | |
| Exhaust interface | KF16 | |
| Pumping rate | 1.1L/s(4m3/h) | |
| Ultimate vacuum | ≥0.1Pa | |
| Vacuum measurement | Resistance vacuum gauge | |
| Others | Power supply | AC 220V 50Hz |
| Total power | 1.5kW/2kW | |
| Dimension | 570mm * 450mm * 500mm | |
| Weight | 30kg | |
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
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